Substrate Cleaning via Segmented Brush and Dynamic Spray
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Solution Overview
Problem
Existing substrate processing methods cannot effectively clean both the outer circumferential and upper surfaces of substrates simultaneously without increasing cleaning time, limiting the cleanliness of the substrates.
Innovation Solution
A substrate processing method and apparatus that rotate the substrate vertically, using a brush to scrub the lower surface and liquid droplets to clean the upper surface in separate regions, allowing for efficient cleaning of both surfaces without extending the cleaning time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a brush is pressed against the outer circumferential portion of the substrate to clean it, then the cleanliness of the outer circumferential portion is improved, but the upper surface of the substrate cannot be cleaned
Solution Approach 1:
The cleaning function is segmented into two independent cleaning mechanisms: a brush for the outer circumferential portion and a liquid droplet spray system for the upper surface. This segmentation allows each mechanism to specialize in cleaning its designated area without interfering with the other, thereby improving both the cleanliness of the outer circumferential portion and the expandability of cleaning coverage to include the upper surface.
Solution Approach 2:
The patent merges the brush cleaning mechanism and the liquid droplet spray cleaning mechanism into a single integrated substrate cleaning system. Both cleaning mechanisms operate simultaneously on different portions of the substrate (outer circumferential and upper surface respectively), achieving comprehensive cleaning coverage without increasing total cleaning time, thus improving both cleanliness and adaptability.
2Loss of time
If liquid droplets are caused to collide with the upper surface of the substrate while a brush cleans the outer circumferential portion, then cleaning time is reduced, but the cleanliness may not be sufficiently enhanced
Solution Approach 1:
The upper surface cleaning area is segmented into multiple zones (center region, intermediate region, and outer circumferential region) with different cleaning mechanisms applied to each zone. The liquid droplet collision cleaning is applied to the center and intermediate regions, while the brush cleaning is applied to the outer circumferential region. This segmentation ensures that each region receives the most effective cleaning method, maintaining high cleanliness standards while reducing overall cleaning time through parallel processing.
3Area of stationary object
If the collision position of liquid droplets is moved between the center and outer circumference of the substrate, then the entire upper surface can be cleaned, but the cleaning process becomes more complex
Solution Approach 1:
The liquid droplet spray system is designed to be dynamically movable, allowing the collision position of liquid droplets to be adjusted between the center and outer circumference of the substrate. This dynamic positioning capability enables the system to clean different regions of the upper surface by moving the spray nozzle radially outward, covering the center region, intermediate region, and outer circumferential region sequentially or simultaneously, thereby expanding the cleaned area without requiring multiple fixed spray systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances substrate cleanliness by physically removing foreign matter from both surfaces while maintaining or reducing the overall cleaning time, ensuring thorough cleaning of the upper surface without prolonging the process.
Implementation Method 1
the brush is pressed against the lower surface inclined portion of the rotating substrate... Foreign matters such as particles are peeled off from the substrate by the physical force from the brush
Implementation Method 2
Foreign matters such as particles are peeled off from the substrate by the physical force from the brush
Implementation Method 3
the plurality of liquid droplets collide with a region within the upper surface of the substrate from the center of the substrate to the middle of the substrate... Foreign matters such as particles are peeled off from the substrate by physical force due to collision of the liquid droplets
Data Source
AI summary
In parallel with a lower-side scrub cleaning step where a brush is contacted with a lower surface inclined portion of a substrate, a center-side spray cleaning step is performed where a collision position of liquid droplets with respect to an upper surface of the substrate is moved between the center of the substrate and the middle of the substrate while the liquid droplets collide with the upper surface of the substrate. Thereafter, in parallel with an upper-side scrub cleaning step where the brush is contacted with an upper surface inclined portion of the substrate, an outer circumference-side spray cleaning step is performed where the collision position of the liquid droplets with respect to the upper surface of the substrate is moved between the middle of the substrate and the outer circumference of the substrate while the liquid droplets collide with the upper surface of the substrate.