Substrate Collection Control for Coating Apparatus Downtime
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Solution Overview
Problem
In semiconductor device manufacturing, when a breakdown occurs in a coating and developing treatment apparatus, substrates in various states (e.g., with developing solution or at high temperatures) are difficult to collect, leading to contamination and instability issues, which prolong the apparatus' downtime and reduce production efficiency.
Innovation Solution
A method and apparatus where substrates are collected to a transfer-in/out section only after their treatments are completed, using a substrate transfer means that controls the collection process to avoid contamination and thermal effects, allowing for early resumption of treatment without maintenance needs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If substrates are collected immediately when a trouble occurs, then the collection time is reduced, but the transfer unit and delivery unit become contaminated with developing solution or thermally affected, requiring maintenance and extending downtime
Solution Approach 1:
The control unit determines whether a substrate can be collected by checking if its treatment is completed before initiating collection. This preliminary assessment prevents contaminated or thermally affected substrates from being transferred, avoiding contamination of the transfer unit and delivery unit while still enabling timely collection of ready substrates
2Ease of operation
If substrates in various treatment states are collected, then the collection operation is simplified, but the transfer unit becomes contaminated or thermally affected, adversely affecting subsequent substrate treatment
Solution Approach 1:
The control unit receives information about the treatment state of each substrate and uses this feedback to determine whether collection is appropriate. This feedback mechanism ensures that only substrates in suitable states (treatment completed, no developing solution, appropriate temperature) are collected, preventing contamination and thermal effects on the transfer unit and delivery unit
3Manufacturing precision
If maintenance of the transfer unit and delivery unit is performed to prevent contamination effects, then the substrate treatment quality is maintained, but the time from trouble occurrence to resumption is extended, reducing production efficiency
Solution Approach 1:
By determining treatment completion status before collection, the system performs a preliminary action that prevents contamination from occurring in the first place. This eliminates the need for subsequent maintenance activities, thereby maintaining substrate treatment quality while minimizing downtime and maximizing production efficiency
Data Source
AI summary
When a trouble occurs in a substrate treatment apparatus, the substrate existing in the substrate treatment apparatus is quickly collected without exerting adverse effects on the subsequent substrate treatment to resume the substrate treatment early. At the time of occurrence of trouble in a coating and developing treatment apparatus, all of the substrates in the coating and developing treatment apparatus are collected to a transfer-in/out section using a transfer unit in the apparatus. In this event, each transfer unit transfers the substrate from each position at the time of occurrence of trouble in a direction toward the transfer-in/out section for collection. Further, the substrate under treatment in the treatment unit at the time of occurrence of trouble is collected after the treatment is finished.