Substrate Process Component Recycling via Controlled Mechanical Cutting

The patent replaces chemical cleaning methods with mechanical removal methods (such as scraping, brushing, or blasting) to remove residue from substrate process components. This substitution eliminates the degrading chemical reactions between cleaning agents and the component materials while still achieving effective residue removal through physical mechanical action.

The patent introduces an intermediary mechanical removal step between residue deposition and component degradation. Instead of allowing chemicals to directly contact and react with the substrate process components, a mechanical intermediary (such as a removable coating or protective layer) is used to facilitate residue removal without chemical degradation of the underlying component.

The patent replaces chemical etching or dissolution methods with mechanical removal techniques specifically tailored for aluminum components. Methods such as mechanical scraping, abrasive blasting, or ultrasonic vibration are used to remove aluminum deposition materials without the aggressive chemical reactions that would substantially degrade the base aluminum components.

The patent applies localized mechanical removal methods that target only the deposited material layers while preserving the base aluminum component structure. By controlling the mechanical action to affect only the surface deposition layers and not penetrate into the bulk material, the integrity of the aluminum components is maintained while achieving effective deposition removal.

The patent replaces chemical cleaning methods with mechanical removal methods for high thermal conductivity components (such as copper or aluminum). This substitution preserves the thermal management functionality of these expensive materials by eliminating chemical degradation while still achieving effective residue removal, thereby extending their service life and justifying their high cost.

The patent applies protective measures before chemical cleaning processes to prevent degradation of high thermal conductivity components. This may include applying protective coatings, using selective masking, or implementing preventive mechanical removal methods that cushion these expensive components from the degrading effects of chemical cleaners, thereby preserving their thermal performance and extending service life.