Substrate Container Ventilation with Lid-Based Airflow Control
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Solution Overview
Problem
Conventional substrate processing methods incur high running costs due to increased ventilation flow rates needed to prevent dust and outside air from entering containers during transfer, leading to substrate contamination and increased energy consumption.
Innovation Solution
The method involves using a container with a fan filter unit and a lid that adjusts its open and closed states during storage and transfer, allowing controlled airflow to maintain substrate purity while reducing energy consumption by optimizing ventilation flow rates based on the container's position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ventilation is performed with the fan filter unit when the container is stored in the storage shelf and transferred, then substrate purity is maintained by preventing dust attachment and outside air entry, but the ventilation flow rate must be increased and ventilation continued for a long period, increasing running costs
Solution Approach 1:
The fan filter unit operates periodically rather than continuously. It runs at high flow rate only when the lid is opened for substrate transfer, and stops or reduces flow when the lid is closed during storage and transfer. This periodic operation maintains substrate purity during critical moments while dramatically reducing overall energy consumption and running costs.
Solution Approach 2:
The ventilation flow rate parameter is dynamically changed based on lid position. When the lid is open, the fan filter unit operates at high flow rate to maintain positive pressure and prevent dust entry. When the lid is closed, the flow rate is reduced or stopped, eliminating unnecessary energy consumption while still maintaining purity during the closed state.
2Reliability
If the fan filter unit operates at high ventilation flow rate to prevent back flow of outside air, then substrate purity is maintained, but the running cost of the fan filter unit increases
Solution Approach 1:
The system applies high ventilation flow rate only periodically when the lid is opened for substrate transfer operations. During storage and transfer with the closed lid, the fan filter unit operates at low or zero flow rate. This periodic high-flow operation maintains substrate purity during vulnerable moments while minimizing overall energy consumption and running costs.
Solution Approach 2:
The ventilation flow rate parameter is dynamically adjusted based on operational requirements and lid position. High flow rate is applied only when necessary (lid open during transfer), while low or zero flow rate is used during storage and transfer operations, optimizing the balance between substrate purity maintenance and energy cost reduction.
3Use of energy by stationary object
If the fan filter unit stops operation when substrates are transferred with the substrate transfer device, then energy consumption is reduced, but clean air in the substrate transfer area enters inside the container and dust attaches to substrates
Solution Approach 1:
The fan filter unit operates in sync with substrate transfer operations. It runs at high flow rate specifically during the period when the lid is opened for substrate transfer, creating positive pressure to prevent dust entry. When transfer is complete and the lid closes, the unit stops or reduces operation. This periodic operation ensures substrate purity during vulnerable transfer moments while minimizing energy consumption during storage.
4Reliability
If ventilation is performed for a long period to maintain substrate purity during storage and transfer, then substrate purity is maintained, but the running cost of the fan filter unit increases
Solution Approach 1:
The fan filter unit operates periodically based on lid position rather than continuously. It activates at high flow rate only when the lid is opened for substrate transfer operations and stops or reduces flow when the lid is closed during storage and transfer. This approach maintains substrate purity during critical transfer moments while dramatically reducing total ventilation duration and associated running costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents dust and outside air from entering the container, maintaining substrate purity during transfer and storage, while minimizing energy usage and running costs.
Implementation Method 1
causes movement of air from the second opening toward the first opening
Data Source
AI summary
The method for processing substrates for substrate processing facility includes the steps of performing ventilation a the fan filter unit while putting a lid of a container in a closed state, when the container is stored in a storage shelf, and is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.