Substrate Container Door Timing for Particle-Controlled Transfer

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Solution Overview

Problem

The introduction of particles into a new container when replacing an old container in semiconductor manufacturing processes, and the environmental changes caused by the old container to the new container.

Innovation Solution

A method of treating a substrate that involves determining the timing of opening the door of a new container based on the treatment progress of the substrates in an existing container, ensuring that the new container is not opened until the existing container's unloading process is complete, thereby preventing particle introduction and minimizing environmental changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the new container is opened immediately after being transferred, then the substrate transfer process can proceed without waiting, but particles may be introduced into the new container and environmental changes may occur

Engineering Contradiction:

Improvesubstrate transfer efficiencyVSAvoidparticle introduction and environmental changes

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The system performs preliminary actions by transferring the new container to the standby load port and preparing the door opening mechanism in advance, but delays the actual door opening until the old container is completely unloaded. This preliminary preparation without immediate execution prevents particle introduction while maintaining operational readiness.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system applies preliminary anti-action by preventing the door of the new container from opening during the critical period when particle contamination could occur. The control unit actively restricts door opening until the old container is fully processed, counteracting the tendency to open doors immediately for productivity reasons.

Inventive Principle:

Principle #9Preliminary anti-action

2Loss of time

If the door of the new container is opened early to prepare for substrate transfer, then the transfer process can start sooner, but the new container is exposed to environmental changes from the old container

Engineering Contradiction:

Improvewaiting time for substrate transferVSAvoidenvironmental stability of container

Core Design Contradiction:

Loss of timeVSStability of the object's composition

Solution Approach 1:

The substrate transfer process is segmented into two independent pathways: substrates from the old container are transferred to the treatment unit, while the new container is simultaneously prepared in the standby load port. This segmentation allows the new container to remain closed and environmentally stable while still being ready for immediate substrate transfer once the old container is unloaded.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The standby load port serves as an intermediary zone where the new container can be transferred and prepared without being immediately exposed to the treatment environment. This intermediate position allows the container to be ready for substrate transfer while maintaining its environmental stability through closed-door protection.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If the system waits for the old container to be completely unloaded before opening the new container, then particle introduction is prevented, but the overall process time increases

Engineering Contradiction:

Improvecleanliness of substrate transferVSAvoidsubstrate transfer speed

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The system maintains continuity of useful action by overlapping operations: while the old container is being unloaded, the new container is simultaneously transferred to the standby load port and prepared. This continuous preparation ensures that as soon as the old container is unloaded, the new container is already ready, eliminating idle waiting time while maintaining cleanliness through delayed door opening.

Inventive Principle:

Principle #20Continuity of useful action

Data Source

PatentUS20250201603A1Method of treating substrate

Publication Date: 2025.06.19 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

Disclosed is a method of treating a substrate, the method including: seating a first container on a first load port; opening a door of the first container seated on the first load port; after the door of the first container is opened, sequentially taking out one or more sheets of substrates of a first group received in the first container and transferring the taken-out substrates to a substrate treatment unit, and treating the substrates of the first group in the substrate treatment unit; seating a second container on a second load port; opening a door of the second container seated on the second load port; and after the door of the second container is opened, sequentially taking out one or more sheets of the substrates of the second group received in the second container and transferring the taken-out substrates to the substrate treatment unit and treating the substrates of the second group in the substrate treatment unit, in which a timing of opening the door of the second container is determined based on a treatment progress of the substrate of the first group.