Substrate Storage Container Elastic Locking Vibration Damping
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate storing containers propagate vibrations from wafer transport apparatus to stored wafers, causing damage, particle generation, and static electricity, which leads to friction and contamination.
Innovation Solution
A substrate storing container with a tubular wall portion and a lid body, featuring a locked portion with an elastically deformable elastic member sandwiched between the flange portion and the lifting member, which absorbs vibrations and reduces stress on the container main body.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the locked portion is made from hard resin and directly connected to the lifting member, then the substrate storing container can be easily lifted and transported, but vibration from the lifting member propagates directly to the container main body and stored wafers, causing damage and particle generation
Solution Approach 1:
The patent introduces an elastic member as an intermediary between the lifting member and the container main body. This elastic member absorbs and dampens vibrations while still allowing the lifting function to operate effectively, thus resolving the contradiction between ease of lifting and vibration propagation
Solution Approach 2:
The patent changes the physical parameter of the locked portion by using an elastic member instead of rigid hard resin. This parameter change allows the structure to maintain lifting functionality while introducing vibration-dampening properties through the elastic characteristics of the material
2Strength
If the locked portion is made rigid from hard resin, then the structure is simple and strong, but it transmits vibration directly to the wafers, causing friction, particle generation, and static electricity
Solution Approach 1:
The elastic member serves as a mediator that breaks the direct rigid connection between the lifting member and container main body. This intermediary element maintains structural integrity while preventing the transmission of harmful vibrations that cause particle generation and static electricity
Solution Approach 2:
The patent employs an elastic member that functions as a flexible element within the locked portion. This flexible component absorbs mechanical energy from vibrations, preventing it from reaching the wafers and causing harmful effects like particle generation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses vibration propagation to the wafers, reducing friction and static electricity, thereby minimizing damage and contamination during transport.
Implementation Method 1
an elastically deformable elastic member provided at a lower face of the flange portion and/or at a rim portion of the flange portion
Implementation Method 2
the locked portion is locked by the lifting member in a state in which the elastic member is sandwiched between the flange portion and the lifting member
Data Source
AI summary
A substrate storing container that stores substrates composed of semiconductor wafers includes: a locked portion that is arranged at a center portion of an upper wall and is locked by a lifting member that can lift a container main body; in which the locked portion includes a plate-like flange portion having a lower face that faces the upper wall and an elastically deformable elastic member provided at a lower face of the flange portion and/or at a rim portion of the flange portion; and in which the locked portion is locked by the lifting member in a state in which the elastic member is sandwiched between the flange portion and the lifting member.