Substrate Storing Container With Flexible Support Angles
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Solution Overview
Problem
Conventional substrate storing containers transmit impacts to substrates during transport, potentially damaging them due to the design of the back side and lid body side substrate support portions.
Innovation Solution
The substrate storing container is designed with a back side substrate support portion that forms a pair with the lid body side support portion, allowing flexibility and supporting substrates at a specific angle to absorb impacts, with a center angle of at least 20° and no more than 55°, when viewed in the thickness direction, to minimize impact transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the back side substrate support portion and lid body side substrate support portion are designed to support substrates firmly, then substrate positioning stability is improved, but impact transmission to substrates increases during transport
Solution Approach 1:
The support portions are designed with specific geometric parameters (center angle of 20-55 degrees relative to the depth direction reference line) that optimize the balance between stable substrate positioning and impact absorption. This parameter optimization allows the support structure to maintain substrates firmly while reducing harmful impact transmission during transport.
2Ease of manufacture
If the back side substrate support portion is positioned symmetrically, then manufacturing simplicity is improved, but impact absorption capability deteriorates
Solution Approach 1:
The back side substrate support portion is positioned asymmetrically relative to the substrate center, with a specific center angle of 20-55 degrees from the depth direction reference line. This asymmetric positioning creates optimal impact absorption geometry while maintaining manufacturing feasibility through clear angular specifications.
3Stability of the object's composition
If rigid support structures are used for substrates, then substrate holding stability is improved, but shock absorption during transport deteriorates
Solution Approach 1:
By optimizing the center angle parameter of the support portions to 20-55 degrees, the design achieves a balance where the support structure provides sufficient holding stability while the geometric configuration inherently absorbs shocks during transport, eliminating the need for separate cushioning materials.
Data Source
AI summary
The lid body side wafer support parts allow flexibility to be exhibited and supports the wafers. If a closed state substrate is defined as being a wafer which is stored in the substrate storing space in a container main body in a state wherein the container main body opening portion is closed by the lid body, and a closed time center is defined as being the center of a closed state substrate, the back side substrate support portion, when a closed state substrate is viewed in the thickness direction, are disposed in a pair about a depth direction reference line and support the wafer. A center angle which the back side substrate support portion form toward the depth direction with respect to a left/right direction reference line when a closed state substrate is viewed in the thickness direction is 20-55°.