Shock Absorbing Substrate Container with Frangible Corner Flanges
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Solution Overview
Problem
Fragile semiconductor masks and wafers are prone to damage during storage and transportation due to impact and foreign particle contamination, with existing containers failing to adequately absorb shocks and prevent particle adherence.
Innovation Solution
A shock-absorbing substrate container with curved flanges and apertures at corners that deform or fracture upon impact, distributing the force of impact over time and reducing energy transmission to the contents, while also providing a dust-free environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional containers are used to store and transport substrates, then substrates are protected from foreign particle contamination, but substrates remain vulnerable to damage from impact shocks
Solution Approach 1:
The patent incorporates shock-absorbing elements (such as foam materials, compliant layers, or deformable structures) into the container design before shipping occurs. These elements are pre-positioned to cushion substrates during transport, absorbing impact energy before it reaches the fragile semiconductor wafers or masks inside, thereby resolving the contradiction between contamination protection and impact resistance.
Solution Approach 2:
The container employs composite material construction, combining rigid structural components (for maintaining seal integrity and contamination protection) with shock-absorbing materials (such as polymers, foams, or elastomers). This composite approach allows the container to simultaneously provide dust-free environment protection and impact shock absorption, addressing both reliability concerns.
2Strength
If shock-absorbing elements are added to the container, then substrate protection from impact is improved, but container complexity and manufacturing difficulty increase
Solution Approach 1:
The patent integrates shock-absorbing functionality directly into existing container components rather than adding separate, complex shock absorption systems. For example, the container walls or internal support structures are designed with inherent shock-absorbing characteristics through material selection or geometric modifications, merging protection functions into unified components and minimizing added complexity.
Solution Approach 2:
The invention modifies existing container parameters (such as wall thickness, material composition, or structural geometry) to achieve shock absorption without fundamentally redesigning the container architecture. By adjusting parameters like the thickness of container walls or the density of support materials, the design achieves improved impact resistance while maintaining manufacturing feasibility and structural simplicity.
3Strength
If thicker container walls are used to absorb shock, then impact protection is improved, but manufacturing cost and material usage increase
Solution Approach 1:
The patent applies shock-absorbing features selectively at critical locations where impact is most likely to occur (such as corners, edges, or areas directly supporting substrates) rather than uniformly thickening the entire container. This localized approach concentrates material usage where it provides maximum protection, reducing overall material consumption while maintaining effective shock absorption capabilities.
Solution Approach 2:
The container design incorporates segmented or modular shock-absorbing elements distributed at strategic positions rather than using a single thick-walled structure. This segmentation allows the container to achieve comparable or superior shock protection through multiple smaller, strategically placed elements, reducing total material usage while maintaining protection effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances substrate protection by effectively absorbing impact energy, reducing the likelihood of container opening and providing a record of significant events through intentional fracturing, while being cost-effective and easy to manufacture.
Implementation Method 1
Shock absorbing fingers are positioned at corners of the container and are deflectable or frangible to absorb impacts at the corners
Implementation Method 2
the flanges with apertures can be configured to be frangible, fracturing upon impact providing an uneraseable record of the impact
Implementation Method 3
The impact energy that is transmitted inside the package can then be further absorbed by pads and cushions supporting the substrates
Data Source
AI summary
A substrate container is generally comprised of a cover, a base, a latching mechanism, and a substrate retention system. Substrate container has corners with flanges disposed at the corners. Each flange has a hole there through to enhance shock absorption capability by the container, and thus provide greater protection to the substrate.