Substrate Storage Container Venting for Purge Gas Flow Between Wafers
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Solution Overview
Problem
Conventional substrate storing containers face inefficiencies in gas purging, particularly when the lid is not closed, as the purge gas does not effectively reach the gaps between substrates, and retrofitting components to improve gas flow is complex and dimensionally constrained.
Innovation Solution
The substrate storing container features a ventilation passage forming unit insert-molded with the container main body, allowing for efficient introduction of purge gas into the gaps between substrates, with a configuration that includes a first component for gas flow and a second component to change the gas flow direction, enabling easy retrofitting and improved gas exchange.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the gas outlet is positioned vertically below the substrates to align with the gas inlet, then the gas flow path is simplified, but the gas purging efficiency is reduced because the purge gas does not reach the gaps between substrates
Solution Approach 1:
The gas outlet is repositioned from a vertical alignment below the substrates to a lateral position at the end face of the container main body. This dimensional change in gas outlet placement allows the purge gas to flow horizontally into the substrate gaps, solving the inefficiency of vertical gas flow that cannot reach between substrates.
Solution Approach 2:
The gas outlet is specifically positioned at the end face portion of the container main body to create localized gas injection points that directly target the substrate gaps. This local quality enhancement ensures that purge gas is delivered precisely where needed - into the gaps between adjacent substrates - rather than relying on vertical flow patterns.
2Productivity
If a component is added to allow purge gas to flow into substrate gaps, then gas purging efficiency is improved, but the assembly burden increases due to narrow design widths and complex structures
Solution Approach 1:
The gas outlet function is merged directly into the container main body structure itself, rather than being a separate removable component. The ventilation passage is formed by integrating the gas inlet and outlet structures into the container walls, eliminating the need for additional assembly steps and reducing manufacturing complexity.
Solution Approach 2:
The container main body structure serves multiple functions: it provides structural containment for substrates, forms the ventilation passages for gas flow, and incorporates the gas inlet and outlet positions. This multi-functionality reduces the number of separate components needed and simplifies the overall assembly process.
3Productivity
If the lid body is removed to allow gas purging, then gas can reach substrate gaps, but the substrate storing space is exposed to outside air
Solution Approach 1:
The gas purging function is segmented from the main container opening, allowing independent gas injection through dedicated inlet/outlet positions. This segmentation enables gas flow into substrate gaps while the lid body remains closed and sealed, preventing exposure to outside air while maintaining effective gas replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for efficient gas purging into the gaps between substrates, enhancing gas replacement efficiency and simplifying the assembly process by eliminating the need for complex structures or additional components like O-rings.
Implementation Method 1
a ventilation passage that allows a substrate storing space and an external space of the container main body to communicate with each other
Data Source
AI summary
A substrate storing container includes: a container main body including a tubular wall portion, the container main body having a substrate storing space which is formed by an inner face of the wall portion, is able to store a plurality of substrates, and communicates with the container main body opening portion; a lid body which is removably attached to the container main body opening portion and is able to close the container main body opening portion; a ventilation passage which allows the substrate storing space and an external space of the container main body to communicate with each other, wherein the ventilation passage is formed in a ventilation passage forming unit which is insert-molded with the container main body.