Substrate Storage Container Positioning With Inclined Track Ribs

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Solution Overview

Problem

Conventional substrate storage containers with heavy locking mechanisms offset their center of gravity, leading to inclination issues during mounting, which causes frictional resistance and prevents precise positioning on processing equipment, resulting in potential operational interruptions.

Innovation Solution

The substrate storage container features a bottom surface with pairs of parallel ribs and hollow tracks, where the inner surfaces of the tracks are inclined, allowing at least three sides of each positioning part to contact positioning pins, ensuring stable and precise alignment even when the container is inclined, and utilizing a locking mechanism with rotating parts and retractable bars for secure closure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a heavy locking mechanism is incorporated in the door element, then the door element can be securely locked and unlocked, but the center of gravity shifts to the front side causing the container to incline downwards

Engineering Contradiction:
Improvelocking mechanism strengthVSAvoidcontainer stability
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

The patent introduces a counterweight mechanism consisting of a counterweight member and a lifting mechanism that compensates for the weight of the locking mechanism. The counterweight member is positioned to balance the front-side weight, and the lifting mechanism (including a lifting rod and lifting spring) actively adjusts the door element's position to maintain horizontal alignment, preventing the container from inclining downwards.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

2Manufacturing precision

If the container is positioned with front side inclined downwards, then the positioning pins contact the positioning parts, but frictional resistance prevents precise positioning

Engineering Contradiction:
Improvepositioning precisionVSAvoidfrictional resistance
Core Design Contradiction:
Manufacturing precisionVSForce

Solution Approach 1:

The counterweight member and lifting mechanism work together to counteract the gravitational force causing the front-side inclination. The lifting spring provides continuous upward force to maintain the container body in a horizontal position, eliminating the frictional resistance that would otherwise prevent precise positioning of the positioning pins relative to the positioning parts.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

3Extent of automation

If the container is hoisted at the robotic flange, then the container can be conveyed by automatic transporter, but the container cannot be supported in a stable condition

Engineering Contradiction:
Improveautomatic conveyance capabilityVSAvoidcontainer stability
Core Design Contradiction:
Extent of automationVSStability of the object's composition

Solution Approach 1:

The counterweight member is connected to the door element assembly, which includes the locking mechanism. This configuration provides a balancing effect that stabilizes the container body during automatic conveyance by the robotic flange, preventing excessive swinging or tilting that would occur with the front-heavy design.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The lifting mechanism includes a lifting spring that provides dynamic adjustment capability. The spring can absorb shocks and vibrations during conveyance, and the lifting rod can actively adjust the door element's position to maintain stability, transforming the static imbalance into a dynamically balanced system.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables the substrate storage container to be suitably positioned without hindrance, preventing operational interruptions and ensuring high-precision alignment, even when the container is mounted with its door element side inclined downward.

Implementation Method 1

frictional resistance arising when positioning pins 50 of the processing equipment come into contact with positioning parts 40A

Methodology Applied
Scientific EffectFriction: Friction

Data Source

PatentUS7669717B2Substrate storage container and positioning method of the same
Publication Date: 2010.03.02 SHIN ETSU POLYMER CO LTD
  • US7669717B2 patent drawing
  • US7669717B2 patent drawing
  • US7669717B2 patent drawing

AI summary

A container body 1 for accommodating a multiple number of precision substrates in alignment, a door element for opening and closing the open front of container body 1 and a multiple number of positioning parts 40 arranged on the bottom of container body 1 are provided. Each positioning part 40 is formed as a concave portion with a pair of parallel ribs 2 formed on the bottom surface of container body 1 and inner surfaces 9 of curved portions 8 of a track 6 formed in a bottom plate 4. Inner surfaces 9 of track 6 are formed to be inclined linearly becoming gradually wider downwards from their top while the upper ends of inner surfaces 9 are extended to an opposing area 2a located between the lower ends of paired parallel ribs 2.