Substrate Container Lid Holder Positioning Mechanism

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Solution Overview

Problem

Current substrate containers experience continuous positional deviation of substrates due to repeated attachment and detachment of the lid, leading to inaccurate substrate positioning and decreased throughput in transportation and treatment processes.

Innovation Solution

A substrate container design featuring a casing with a lid, a lid holder, and a substrate separating mechanism that includes a contact part movable relative to the lid holder, allowing precise control of substrate positioning by attaching and detaching the lid while ensuring the substrates are held securely during transport.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the lid is repeatedly attached and detached from the casing, then the substrates can be transported from the casing, but the substrates experience continuous positional deviation and cannot be positioned accurately

Engineering Contradiction:
Improvesubstrate transportation capabilityVSAvoidsubstrate positioning accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The lid holder is pre-configured with holding portions that engage with the substrates before the lid is fully attached. This preliminary action secures the substrates in position, preventing deviation during subsequent attachment-detachment cycles while maintaining transportation capability

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The lid holder acts as an intermediary component between the lid and the substrates. It provides a stable interface that holds the substrates firmly during lid attachment/detachment operations, eliminating direct contact forces that cause positional deviation while enabling substrate transportation

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If the lid is repeatedly attached and detached from the casing, then the substrates can be transported, but the substrate treatment process is delayed and throughput decreases

Engineering Contradiction:
Improvesubstrate transportation capabilityVSAvoidsubstrate treatment delay
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The lid holder secures substrates in advance before lid attachment, eliminating the need for re-positioning operations after each detachment. This preliminary securing action streamlines the transportation process and reduces idle time during substrate treatment operations

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The lid holder maintains continuous substrate holding capability throughout the lid attachment-detachment cycle. This continuous action ensures substrates remain properly positioned without interruption, eliminating delays in the substrate treatment process while maintaining transportation efficiency

Inventive Principle:
Principle #20Continuity of useful action

3Manufacturing precision

If a lid holder is added to hold substrate ends, then substrate positioning is improved, but the device complexity increases

Engineering Contradiction:
Improvesubstrate positioning accuracyVSAvoidcontainer structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The lid holder is designed to perform multiple functions: it holds substrate ends for positioning, provides a mounting interface for the substrate separating mechanism, and structurally connects the lid to the casing. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity while achieving improved positioning accuracy

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS10381249B2Substrate container, load port apparatus, and substrate treating apparatus
Publication Date: 2019.08.13 SCREEN HOLDINGS CO LTD
  • US10381249B2 patent drawing
  • US10381249B2 patent drawing
  • US10381249B2 patent drawing

AI summary

A substrate container includes a casing, a rack, a lid, a lid holder, and a substrate separating mechanism. The casing has on its front face an opening. The substrate separating mechanism has a contact part that directly contacts substrates. The contact part is movable relative to the lid holder. The lid moves forward to the opening, and the contact part moves backward relative to the lid holder, whereby the lid holder holds ends of the substrates. The lid moves backward from the opening, and the contact part moves forward to the lid holder, whereby the substrate separating mechanism separates the substrates from the lid holder.