Substrate Storage Container Resin Support for Low-Particle Sliding
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Solution Overview
Problem
Existing substrate storing containers face issues where high friction materials prevent smooth substrate movement during transportation, leading to potential contamination and manual intervention for removal, while low friction materials cause substrate rotation and increased contamination.
Innovation Solution
A substrate storing container with a back side substrate support portion composed of an alloy resin primarily made of polycarbonate and polybutylene terephthalate, with a mass ratio of polybutylene terephthalate greater than polycarbonate, ensuring low friction for smooth substrate movement and reduced contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the friction coefficient of the back side substrate support portion is high, then substrate rotation is suppressed during transportation, but substrate cannot slide smoothly to the removal position
Solution Approach 1:
The support portion has different surface properties in different regions: the first region has high friction to prevent rotation during transport, while the second region has low friction to enable smooth sliding to the removal position. This spatial differentiation of friction characteristics resolves the contradiction between stability and ease of operation.
Solution Approach 2:
The system transitions from a static high-friction state during transportation to a dynamic low-friction state during substrate removal. The support portion dynamically adapts its friction characteristics based on the operational phase, allowing it to provide stability when needed and facilitate movement when needed.
2Ease of operation
If the friction coefficient of the back side substrate support portion is low, then substrate can slide smoothly to the removal position, but substrate rotation occurs during transportation
Solution Approach 1:
The support portion has different surface properties in different regions: the first region has high friction to prevent rotation during transport, while the second region has low friction to enable smooth sliding to the removal position. This spatial differentiation of friction characteristics resolves the contradiction between stability and ease of operation.
3Stability of the object's composition
If high friction material is used for the back side substrate support portion, then substrate alignment is maintained, but particle generation increases causing contamination
Solution Approach 1:
The support portion has different surface properties in different regions: the first region has high friction to prevent rotation and maintain alignment, while the second region has low friction to minimize particle generation during substrate movement. This spatial differentiation resolves the contradiction between alignment stability and contamination control.
4Object-generated harmful factors
If low friction material is used for the back side substrate support portion, then particle generation is reduced, but substrate alignment may be compromised during transportation
Solution Approach 1:
The support portion has different surface properties in different regions: the first region has high friction to prevent rotation and maintain alignment, while the second region has low friction to minimize particle generation during substrate movement. This spatial differentiation resolves the contradiction between alignment stability and contamination control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable automatic substrate removal by transfer machines while minimizing particle generation, maintaining substrate alignment and preventing contamination.
Implementation Method 1
When the friction coefficient of the material constituting the back side substrate support portion is low, even if the substrate is held by a strong force, the substrate will rotate due to vibration or the like during transportation
Implementation Method 2
When the friction coefficient of the material constituting the back side substrate support portion is high, even if the substrate is held by a light force, the substrate will not rotate easily due to vibration or the like during transportation
Data Source
AI summary
A substrate storage container according to the present invention is configured such that: a substrate W slides with respect to a second contact surface 601 at least when transitioning from a state in which an container body opening is not closed by a lid to a state in which the container body opening is closed by the lid, or when transitioning from a state in which the container body opening is closed by the lid to a state in which the container body opening is not closed by the lid; and an inner-side substrate support part 6 is composed of an alloy resin mainly containing a polycarbonate resin and polybutylene terephthalate resin, with the mass of the polybutylene terephthalate resin being greater than the mass of the polycarbonate resin.