Semiconductor Substrate Container Sealing with Rib Structure
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Solution Overview
Problem
Conventional substrate storage containers face challenges in sealing due to dimensional variations and poor shape stability of the container body and gasket, leading to air and contamination of substrates.
Innovation Solution
A substrate storage container design with a compressively deformable gasket and a sealing surface with controlled flatness, along with a reinforcing rib structure that reduces thickness variations, ensuring effective sealing between the container body and door element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the container body is molded with heavy wall thickness to assure strength, then the strength is improved, but the wall thickness uniformity deteriorates causing sink and deformation
Solution Approach 1:
The container body is divided into multiple rib structures (reinforcing ribs, engaging ribs, attachment ribs) that are integrally formed with the main body. These ribs segment the thick wall into thinner sections, preventing sink and deformation while maintaining overall strength through the distributed rib structure.
Solution Approach 2:
Different regions of the container body have different structural characteristics. The bottom and sides have integrally formed ribs for local reinforcement, while the front open portion has a reduced thickness to ensure sealing surface flatness. This local differentiation allows strength where needed without compromising manufacturing precision in critical sealing areas.
2Stability of the object's composition
If the reinforcing rib is integrally and thickly formed with the rim to provide rigidity, then the rigidity is improved, but the sealing surface flatness deteriorates due to sink during molding
Solution Approach 1:
The reinforcing rib is integrally formed with the rim to provide rigidity, but the thickness is specifically reduced in the region where the sealing surface is formed. This local thickness reduction prevents sink and deformation in the sealing area while maintaining the overall rigidity provided by the integral rib structure.
Solution Approach 2:
The reinforcing rib structure is segmented into different thickness regions - thicker portions provide rigidity and structural support, while thinner portions at the sealing surface ensure flatness and prevent sink during molding. This segmentation resolves the contradiction between rigidity and sealing surface quality.
3Adaptability or versatility
If the gasket is formed with a tapered sealing part, then the sealing flexibility is improved, but the shape stability deteriorates causing wave-like deformation
Solution Approach 1:
The gasket's physical parameters are optimized by controlling the thickness and length of the sealing part within specific ranges. The sealing part has a controlled thickness of 0.5-2mm and length of 5-15mm, which provides sufficient flexibility for sealing while preventing excessive deformation. The tapered shape is maintained but with controlled dimensions to balance flexibility and stability.
4Manufacturing precision
If dimensional variations of the container body and gasket build up, then the sealing difficulty increases, but the substrate contamination risk increases
Solution Approach 1:
The gasket parameters are specifically controlled - thickness of 0.5-2mm and length of 5-15mm - to compensate for dimensional variations in the container body. These controlled parameters ensure consistent sealing performance despite variations in container body dimensions, preventing air and contaminants from penetrating and contaminating substrates.
Solution Approach 2:
The gasket is formed by integrating different materials with complementary properties - a base material providing structural support and a sealing part material providing flexibility and sealing capability. This composite structure compensates for dimensional variations and ensures reliable sealing to prevent substrate contamination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution prevents air and contaminants from entering the container, maintaining substrate integrity by optimizing the sealing performance and reducing equipment load during door closure.
Implementation Method 1
deforms by compression between the sealing surface of the open front portion of the container body and the door element
Implementation Method 2
an elastic gasket that seals between the container body and the door element by deformation
Data Source
AI summary
A container includes: a container body for storing substrates of semiconductor wafers; a door element detachably fitted to an open front portion of the container body; and a compressively deformable gasket for sealing between the container body and the door element. While a sealing surface for the gasket is formed on an inner periphery of an open front portion of the container body so that the difference between the maximum and minimum of a flatness is less than 0.50 mm, a fitting portion for the gasket is formed in a frame shape. The gasket is formed of a base fitted to the fitting portion; a flexible sealing part extended from the base toward the sealing surface; and a contact portion that is curvedly formed at a distal end of the sealing part and put in press-contact with the sealing surface.