Substrate Storing Container With Segmented Heat-Resistant Support

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Solution Overview

Problem

Conventional substrate storing containers lack heat-resisting properties, leading to potential damage from high-temperature substrates and humidity issues due to moisture absorption, which can affect the integrity and safety of stored substrates during transportation and storage.

Innovation Solution

A substrate storing container design featuring a heat-resistant substrate contact portion and a lower moisture absorption contact portion support, with a configuration that includes separate substrate contact and support components made from materials like PEEK, and a container body with reduced moisture absorption, ensuring the substrates are protected from thermal damage and humidity-related issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the substrate support plate-like portion is made of a material with heat-resisting property, then the substrate can be protected from thermal damage, but water is released from the support portion due to decreased humidity, causing humidity to rise inside the container

Engineering Contradiction:
Improveheat-resisting propertyVSAvoidhumidity rise
Core Design Contradiction:
TemperatureVSObject-affected harmful factors

Solution Approach 1:

The substrate support structure is divided into two distinct parts: a substrate contact portion made of heat-resisting material (PEEK) that directly touches the substrate, and a support portion made of low-hygroscopic material that provides structural support. This segmentation allows each part to perform its specific function without the adverse effects of the other material properties.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different parts of the substrate support structure are assigned different material properties based on their specific functions. The substrate contact portion uses heat-resisting material to protect against thermal damage, while the support portion uses low-hygroscopic material to prevent moisture absorption and humidity release. This local differentiation of material qualities resolves the contradiction between heat resistance and humidity control.

Inventive Principle:
Principle #3Local quality

2Temperature

If the substrate storing container is made of material with heat-resisting property, then thermal damage to substrates is prevented, but the container dimension changes due to heat strain, deviating from standard substrate height

Engineering Contradiction:
Improveheat-resisting propertyVSAvoiddimensional stability
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The container structure is segmented into thermal management components (substrate contact portion with heat-resisting material) and dimensional stability components (support portions with low thermal expansion material). This allows the heat-resisting function to be isolated to specific contact areas while the overall container dimensions are maintained by stable support structures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Heat-resisting material is applied locally only where substrate contact occurs, rather than throughout the entire container. The support structures use materials with low thermal expansion coefficients to maintain dimensional stability. This local application of heat-resisting properties prevents overall dimensional changes while still protecting the substrate from thermal damage.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If conventional substrate storing container materials are used, then manufacturing is easier and cost is lower, but scratches and resin melting occur on substrate contact portions, damaging the substrate

Engineering Contradiction:
Improvemanufacturing easeVSAvoidsubstrate damage
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The substrate support structure is segmented into a contact portion made of scratch-resistant, heat-resisting material (PEEK) and a support portion made of conventional material. This segmentation protects the substrate from damage at the contact interface while maintaining manufacturing efficiency for the overall structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The substrate support structure uses a composite construction combining PEEK material for the substrate contact portion (providing scratch and heat resistance) with conventional materials for the support portions. This composite approach delivers the protective properties needed at the substrate interface while maintaining ease of manufacture for the overall container structure.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The container effectively inhibits scratches, resin melting, and humidity-induced damage, maintaining substrate integrity by using heat-resistant and low-hygroscopic materials, ensuring reliable storage and transportation of substrates.

Implementation Method 1

the substrate contact portion is made of a material having a heat-resisting property with respect to temperature of the substrates touching the substrate contact portion

Methodology Applied
Scientific EffectHeat resistance:

Implementation Method 2

the contact portion support portion is made of a material having a lower coefficient of moisture absorption than a coefficient of moisture absorption of the substrate contact portion

Methodology Applied
Scientific EffectMoisture absorption: Absorption (physical)

Data Source

PatentUS10535540B2Substrate storing container
Publication Date: 2020.01.14 MIRAIAL CO LTD
  • US10535540B2 patent drawing
  • US10535540B2 patent drawing
  • US10535540B2 patent drawing

AI summary

A substrate storing container includes a container main body, a lid body, and a lateral substrate support portion. The lateral substrate support portion of the substrate storing container includes substrate contact portions touching a substrate when supporting an edge portion of the substrate, and contact portion support portions supporting the substrate contact portions. The substrate contact portions are made of a material having a heat-resisting property with respect to temperature of the substrate touching the substrate contact portions. The contact portion support portions are made of a material having a lower heat-resisting property than that of the substrate contact portions and having a lower coefficient of moisture absorption than that of the substrate contact portions.