Substrate Container Transfer Timing for Higher Throughput

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Solution Overview

Problem

Existing substrate processing apparatuses have limitations in transfer throughput for substrates.

Innovation Solution

The apparatus incorporates a rotating shaft with multiple placement structures, an elevating structure, and a transfer robot, controlled to move at different speeds to enhance transfer efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the placement structure is moved at a high speed to reach the transfer position, then the transfer efficiency is improved, but the container may not be transferred in time and the synchronization is compromised

Engineering Contradiction:

Improvemoving speed of placement structureVSAvoidtransfer timing synchronization

Core Design Contradiction:

SpeedVSLoss of time

Solution Approach 1:

The patent applies dynamics by making the moving speed of the placement structure variable rather than constant. The control unit adjusts the speed dynamically: faster when moving away from the transfer position, and slower when approaching it. This allows the placement structure to cover distance efficiently while still arriving synchronized with the container transfer operation, resolving the contradiction between speed and timing synchronization.

Inventive Principle:

Principle #15Dynamics

2Productivity

If the transfer robot is elevated at a high speed, then the transfer throughput is improved, but the placement structure cannot reach the transfer position in time

Engineering Contradiction:

Improvetransfer throughputVSAvoidmoving speed of placement structure

Core Design Contradiction:

ProductivityVSSpeed

Solution Approach 1:

The patent applies preliminary action by having the placement structure start moving toward the transfer position before the container transfer is complete. The control unit calculates the required movement distance and initiates the movement in advance, so that the placement structure arrives at the transfer position just in time to receive the container. This overlapping of operations increases throughput without sacrificing synchronization.

Inventive Principle:

Principle #10Preliminary action

3Productivity

If the placement structure moves at a constant high speed, then the transfer efficiency is improved, but the precision of positioning at the transfer position deteriorates

Engineering Contradiction:

Improvetransfer efficiencyVSAvoidpositioning precision

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies dynamics by transitioning from constant speed to variable speed operation. The placement structure operates at higher speeds during the majority of its travel to maintain efficiency, then decelerates as it approaches the transfer position to achieve precise positioning. This dynamic speed adjustment allows the system to benefit from both high-speed operation and accurate positioning.

Inventive Principle:

Principle #15Dynamics

Data Source

PatentUS20260040877A1Container transfer method, substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus

Publication Date: 2026.02.05 KOKUSAI DENKI KK

AI summary

It is possible to increase a transfer throughput of the substrate. There is provided a technique that includes: (a) supporting a container capable of accommodating a substrate with a first container support; and (b) controlling a rotating shaft for revolving placement structures arranged in a circumferential direction, an elevating structure for elevating a transfer robot and the transfer robot such that, when transferring a container from the transfer robot to a predetermined placement structure, a second moving speed of the elevating structure at which the transfer robot is elevated is faster than a first moving speed at which the predetermined placement structure is moved to a transfer position where the container is transferable from the transfer robot.