Substrate Storage Container Valve Assembly Without Metal Corrosion
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Solution Overview
Problem
Existing substrate storage containers with valve units face issues of residue corrosion and complex assembly processes, leading to operational inefficiencies and potential gas leakage.
Innovation Solution
A substrate storage container with a valve unit that utilizes an elastic valve without metal components, featuring a holding member, clamping cap, and integrated filters, which securely closes the valve opening using elastic force and allows gas flow control through pressure adjustments, reducing the number of parts and preventing metal corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a valve unit with elastic valve and metal member is used, then gas flow control is achieved, but metal corrosion occurs due to residue adhesion
Solution Approach 1:
The invention removes the metal member from the valve unit structure, extracting the harmful element that causes corrosion. The valve unit now consists only of elastic components (elastic valve, holding member, clamping cap) that can withstand residue exposure without corroding, while maintaining gas flow control functionality.
Solution Approach 2:
The invention changes the material parameter of the valve components from metal to elastic material. This parameter change allows the valve to resist corrosion from residues while maintaining the ability to open and close the gas passage through elastic deformation and gas pressure.
2Reliability
If a valve unit with multiple parts (fixed cylinder, holding cylinder, inner cover cylinder, O-rings) is used, then gas flow control is achieved, but assembly time increases
Solution Approach 1:
The invention merges multiple separate components (fixed cylinder, holding cylinder, inner cover cylinder, O-rings) into a simplified structure with fewer parts. The elastic valve, holding member, and clamping cap are designed to work together as an integrated unit, reducing the number of assembly steps and fastening operations required.
Solution Approach 2:
The valve unit is segmented into three main components (elastic valve, holding member, clamping cap) that can be easily assembled in sequence. The elastic valve is inserted into the holding member, and the clamping cap secures the assembly, creating a modular structure that simplifies assembly compared to the multi-cylinder design.
3Object-affected harmful factors
If elastic valve without metal member is used, then corrosion is prevented, but assembly workability needs improvement
Solution Approach 1:
The invention uses flexible elastic components (elastic valve, holding member, clamping cap) that can be easily assembled through insertion and clamping operations. The flexibility of these elastic parts allows for tolerance compensation and easier alignment during assembly, improving assembly workability while maintaining corrosion resistance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances assembly workability, prevents metal corrosion, ensures airtightness, and allows for efficient gas circulation in both supply and exhaust directions, maintaining container cleanliness and reducing the risk of gas leakage.
Implementation Method 1
The valve opening is tightly closed by the elastic force of the elastic valve
Implementation Method 2
opens it with a gas pressure that exceeds the elastic force
Data Source
AI summary
A substrate storage container includes a container body configured to store substrates, a lid that closes an opening of the container body, and a valve unit that controls the flow of gas to the container body. The valve unit includes an elastic valve having a valve opening that connects a first passage communicating with the outside of the container body to a second passage communicating with the inside of the container body, a holding member that holds the elastic valve, and a clamping cap that is inserted in the elastic valve and secures the elastic valve to the holding member. The valve opening is tightly closed by the elastic force of the elastic valve.