Substrate Processing Control Boards With Master Clock Synchronization
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Solution Overview
Problem
In high-speed control systems for substrate processing, such as ALD, time deviations among control boards can occur due to factors like environmental conditions and individual differences in clock generators, leading to inaccuracies in operation time, which can affect the precision and synchronization of end devices during processing.
Innovation Solution
A substrate processing apparatus with a controller that includes a time deviation corrector, which transmits a clock signal from a higher-level control unit to lower-level control boards to correct deviations in actual operation time, ensuring precise timekeeping and synchronization among high-speed control boards.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If multiple control boards with clock generators are used for high-speed control of end devices, then control speed and responsiveness are improved, but time deviations occur among control boards leading to synchronization errors
Solution Approach 1:
The patent merges the time measurement function across multiple control boards by having them all reference a common master clock signal from the higher-level control unit. This combination approach allows each control board to maintain high-speed independent control while synchronizing their time measurements through the shared clock signal, thereby resolving the contradiction between control speed and time measurement accuracy.
Solution Approach 2:
The time deviation corrector implements a feedback mechanism that continuously monitors and corrects time deviations among control boards. The corrector receives timing information from each control board, compares it against the master clock reference, and applies corrections to maintain synchronization. This feedback loop ensures that time measurement accuracy is maintained despite the use of multiple independent clock generators for high-speed control.
2Ease of operation
If each control board uses its own clock generator for independent operation, then control autonomy and speed are improved, but relative and absolute time deviations occur among boards
Solution Approach 1:
The patent applies local quality by allowing each control board to maintain its own clock generator for local autonomous operation, while simultaneously applying a universal correction based on the master clock signal. Each control board operates independently with its own timing characteristics but receives localized correction adjustments to ensure global synchronization reliability. This resolves the contradiction between control autonomy and synchronization reliability.
Solution Approach 2:
The time deviation corrector acts as an intermediary between the independent control boards and the master clock reference. It receives timing data from each autonomous control board, processes the time deviation information, and applies appropriate corrections. This intermediary mechanism enables control boards to maintain their autonomy while ensuring synchronization reliability through the mediating correction process.
3Adaptability or versatility
If multiple high-speed control boards are connected via network to a single controller, then control capability and flexibility are improved, but network communication delays cause time synchronization errors
Solution Approach 1:
The patent applies preliminary action by having the higher-level control unit transmit the master clock signal to all control boards in advance, before actual processing operations begin. This pre-synchronization ensures that all control boards start with a common time reference, eliminating synchronization errors that would otherwise accumulate during network communication. The preliminary clock distribution maintains synchronization accuracy while preserving control flexibility.
Solution Approach 2:
The patent replaces the mechanical/network-based time synchronization approach with a direct electrical clock signal distribution system. Instead of relying on network communication protocols to synchronize time (which introduces variable delays), the master clock signal is distributed directly to all control boards through dedicated signal paths. This substitution eliminates network communication delays and maintains precise synchronization while preserving system flexibility.
Data Source
AI summary
A substrate processing apparatus includes: a substrate processor including a plurality of end devices and performing substrate processing on a substrate by using the end devices; and a controller controlling the substrate processing in the substrate processor, wherein the controller includes a higher-level control unit and a plurality of control boards that are lower-level control units connected to the higher-level control unit via a network, and the control boards send or receive a control signal to or from the end devices and include a clock generator that performs time measurement, and wherein the controller includes a time deviation corrector that transmits a clock signal for a certain period of time from the higher-level control unit to the control boards and that corrects a deviation in actual operation time caused by the clock generator based on the clock signal from the higher-level control unit, in each of the control boards.