Substrate Processing Control Device Pre-Recipe Selection
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Solution Overview
Problem
Conventional substrate processing systems require manual re-registration of pre-recipe data for each process type, leading to inefficiency and potential typing errors, especially when dealing with different temperature settings, which can result in suboptimal processing results.
Innovation Solution
A control device with a storage unit for process recipes and pre-recipes that automatically selects the appropriate pre-recipe based on specific data from the process recipe, such as temperature, pressure, and gas flow rate, to optimize the substrate processing apparatus for various processes without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual re-registration of pre-recipe data is performed for each process type, then the substrate processing apparatus can be optimized for each process, but the operation time increases and typing errors may occur
Solution Approach 1:
The system automatically selects and applies the appropriate pre-recipe based on process type without requiring manual operator intervention. The control device retrieves process type information, automatically matches it with the corresponding pre-recipe data, and configures the substrate processing apparatus parameters autonomously, eliminating the need for manual re-registration.
Solution Approach 2:
The manual mechanical process of copying and pasting pre-recipe data is replaced by an automated information retrieval and processing system. The control device uses software-based automatic selection and parameter configuration, substituting the manual operator actions with automated computational processes that retrieve and apply the correct pre-recipe data.
2Manufacturing precision
If manual re-registration of pre-recipe data is performed for each process type, then the substrate processing apparatus can be optimized for each process, but the operation complexity increases
Solution Approach 1:
The control device autonomously performs the entire pre-recipe selection and application process without requiring operator intervention. The system self-manages the retrieval of process type information, automatic matching with pre-recipe data, and configuration of processing parameters, thereby simplifying the operator's task to merely initiating the process.
Solution Approach 2:
The control device is designed with universal functionality to handle multiple process types (CVD, ALD, etc.) through a single automated system. Rather than requiring separate manual configuration procedures for each process type, the unified control device automatically adapts to different process types by selecting the appropriate pre-recipe, thereby simplifying the overall operation.
3Manufacturing precision
If manual re-registration of pre-recipe data is performed for each process type, then the substrate processing apparatus can be optimized for each process, but the reliability decreases due to potential typing errors
Solution Approach 1:
The manual data entry process is completely replaced by automated information retrieval from stored pre-recipe databases. The control device programmatically accesses and applies the correct pre-recipe data based on process type, eliminating the human typing errors that occur during manual re-registration while maintaining the process optimization benefits.
Solution Approach 2:
Instead of manually re-typing pre-recipe data, the system automatically copies the correct pre-recipe data from the stored database to the active process configuration. This automated copying process ensures data accuracy by directly transferring the original, error-free pre-recipe data without human intervention in the data entry phase.
Data Source
AI summary
A control device is provided that flexibly controls a substrate processing apparatus for each product process. Four process recipes PM 1 to PM 4 are stored in a first storage unit 255a. Corresponding to each of the process recipes, a high temperature, a medium temperature, and a low temperature pre-recipe are stored in a second storage unit 255b. A process recipe determination unit 260 determines, in response to a recipe specified by the operator, a process recipe corresponding to the specified recipe from the first storage unit 255a. A stage temperature acquisition unit 265 acquires, from the determined process recipe, a stage temperature. A pre-recipe selection unit 270 selects, from the three types of pre-recipes stored in the second storage unit 255b, one pre-recipe corresponding to the stage temperature. Before the wafer W is deposition-processed, therefore, the PM may be well-conditioned according to the selected pre-recipe.