Substrate Processing Controller Energy Recovery Management
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Solution Overview
Problem
Existing substrate processing technologies fail to accurately determine the resource consumption required to recover functional sections to an operating state, leading to inefficient energy management and processing optimization.
Innovation Solution
A substrate processing apparatus and system that includes a controller and resource consumption amount acquisition section to specify functional sections capable of performing assigned processing and obtain the necessary resource consumption amount for recovery to the operating state based on a planned recipe, allowing for precise energy and time management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If functional sections are set in standby state to reduce energy consumption, then energy efficiency is improved, but the time required to recover to operating state increases
Solution Approach 1:
The system performs preliminary actions by predicting the recovery time required for each functional section before actually recovering. The controller calculates which functional sections need to be recovered and estimates the time required, then schedules the recovery process in advance to ensure readiness before substrate processing begins. This allows the system to minimize both energy consumption during standby and recovery time when needed.
2Productivity
If functional sections are recovered to operating state in advance, then processing productivity is improved, but energy consumption increases
Solution Approach 1:
The system dynamically adjusts the state of functional sections based on real-time requirements. Instead of keeping all functional sections in a fixed state, the controller continuously monitors which sections are needed for upcoming substrate processing and selectively recovers only those sections to the operating state. This dynamic approach ensures high productivity when processing is needed while minimizing energy consumption during standby periods.
3Ease of operation
If generic recovery time is used for all functional sections, then control simplicity is maintained, but measurement precision of resource consumption deteriorates
Solution Approach 1:
The system segments the recovery time calculation by individual functional section. Instead of using a single generic recovery time for all sections, the controller calculates and manages recovery time separately for each functional section based on its specific characteristics and current state. This segmentation enables precise tracking of resource consumption for each section while maintaining manageable control through automated calculation.
Data Source
AI summary
A substrate processing apparatus includes a plurality of functional sections 200, 300, 400 and 500 each of which is selectively set in an operating state where an assigned processing thereof is executable on a substrate and a standby state where an energy consumption amount is less than in the operating state, and an apparatus controller 50 which controls a state of each functional section 200, 300, 400, 500 between the operating state and the standby state and causes the functional section in charge of the assigned processing corresponding to a recipe to be set in the operating state and perform the assigned processing in executing the recipe specifying a processing procedure on the substrate. If an execution planned recipe, which is the recipe planned to be executed later, is given, the apparatus controller 50 specifies the functional section capable of being in charge of the assigned processing corresponding to the execution planned recipe out of the plurality of functional sections 200, 300, 400 and 500 and obtains a resource consumption amount necessary to recover the specified functional section specified by the specifying operation to the operating state.