Substrate Processing Controller Automatic Error Recovery
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Solution Overview
Problem
The existing substrate processing technologies face productivity deterioration due to delays in recovery operations when errors occur during processing, leading to substrate quality degradation and apparatus downtime.
Innovation Solution
A substrate processing apparatus with a controller that automatically executes recovery operations based on predefined error handling protocols, allowing for immediate error detection and corresponding recovery actions without operator intervention, thereby minimizing substrate exposure and chamber recovery time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If automatic recovery operations are implemented, then productivity is improved by reducing downtime, but device complexity increases due to additional control systems
Solution Approach 1:
The system performs self-diagnosis and self-recovery through automated error detection and recovery operations. When an error occurs during substrate processing, the controller automatically executes predefined recovery operations without requiring operator intervention, allowing the system to service itself and maintain productivity.
Solution Approach 2:
Recovery operations are prepared in advance as predefined sequences stored in the controller. When an error is detected, the system executes these pre-planned recovery operations immediately, eliminating the need for manual intervention and reducing downtime. The recovery protocols are established beforehand to handle various error conditions.
2Device complexity
If manual recovery operations are used, then device complexity is reduced, but productivity deteriorates due to operator response time delays
Solution Approach 1:
The controller continuously monitors the substrate processing system for errors and provides immediate feedback when anomalies are detected. This real-time monitoring and feedback mechanism enables the system to automatically initiate recovery operations without waiting for operator detection, thereby maintaining productivity while using automated control systems.
3Manufacturing precision
If automatic error detection and recovery is implemented, then substrate quality is improved by minimizing exposure time, but measurement and detection difficulty increases
Solution Approach 1:
The system replaces manual visual inspection and mechanical monitoring with automated electronic sensors and controller-based detection. The controller automatically detects errors during substrate processing by monitoring process parameters, enabling immediate recovery operations that minimize substrate exposure time and maintain substrate quality without relying on operator intervention.
Data Source
AI summary
A substrate processing apparatus includes a chamber, a plurality of devices, and a controller. The chamber is subjected to substrate processing. The plurality of devices execute operations related to substrate processing. The controller controls the operations of the plurality of devices. Further, the controller determines whether or not an error has occurred during performing the substrate processing in a chamber, and causes the plurality of devices to automatically execute a recovery operation corresponding to the content of the error that has occurred when the controller determines that the error has occurred and has suspended the substrate processing.