Substrate Processing Controller Load Distribution
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Solution Overview
Problem
In single substrate processing type substrate processing apparatuses, the high control load at the controller during the start of substrate processing steps can lead to delayed operations and non-uniform processing results due to concentrated data processing loads, which can be costly and complex to address through traditional means like improving the controller's performance or adding more controllers.
Innovation Solution
A schedule preparation method that positions high load operations on the time axis to avoid concentration of control load, allowing for efficient data processing by distributing high load time slots across substrates, enabling flexible schedule adjustments and improved resource utilization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple processing units start substrate processing steps simultaneously, then processing throughput is improved, but control load concentrates at the controller causing data processing delays
Solution Approach 1:
The schedule preparation portion performs preliminary positioning of high load operations on the time axis before actual substrate processing begins. By pre-distributing high load time slots across different time periods and processing units, the controller avoids concentrated data processing loads during simultaneous processing operations, thus preventing processing delays while maintaining high throughput
2Reliability
If controller performance is improved to handle concentrated load, then data processing efficiency is improved, but device cost and complexity increase
Solution Approach 1:
The schedule preparation portion segments high load operations and distributes them across different time slots and processing units. This segmentation prevents concentration of control load on the controller, allowing the existing controller to maintain reliable data processing efficiency without requiring performance upgrades or increased complexity
3Productivity
If more controllers are added to distribute load, then control capacity is improved, but arrangement complexity and space requirements increase
Solution Approach 1:
The schedule preparation portion performs preliminary distribution of high load operations across time slots and processing units before processing begins. This pre-planned load distribution enables the existing single controller to handle processing tasks effectively without requiring additional controllers, thus avoiding increased apparatus arrangement complexity and space requirements
4Manufacturing precision
If uniform substrate processing is ensured, then processing quality is improved, but requires precise timing control which increases complexity
Solution Approach 1:
The schedule preparation portion performs preliminary positioning of all operations including high load operations on the time axis. This pre-planned schedule ensures precise timing control for uniform substrate processing across all processing units while managing complexity through automated schedule generation rather than manual timing coordination
Data Source
AI summary
A method by which a schedule preparing portion included in a substrate processing apparatus, having at least one single substrate processing unit and a controller, prepares a chronological schedule for operations of the substrate processing apparatus. The method includes a schedule preparation step of preparing a schedule for each substrate by positioning, in chronological order, a plurality of blocks, each specifying an operation to be performed on the substrate. The schedule preparation step includes a high load avoidance positioning step in which, in preparing a schedule for a plurality of substrates, blocks corresponding to a high load operation in which a high control load occurs at least temporarily in the controller are positioned on a time axis so that high load time slots, during which a high control load occurs in the controller, are not concentrated.