Substrate Processing Controller Timeout Authentication
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Solution Overview
Problem
The risk of unauthorized editing of operation recipes and apparatus parameters in substrate processing apparatuses leads to potential damage and quality deterioration, as users without editing authority may inadvertently or maliciously alter settings, causing unintended consequences during processing.
Innovation Solution
Implementing a controller that monitors user activity on editing screens, logs out users after a predetermined time of inactivity, and switches to an authentication screen, ensuring only authorized users can continue editing by requiring valid credentials, thereby preventing unauthorized changes to operation recipes and apparatus parameters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the editing screen is left accessible without timeout control, then ease of operation is improved, but reliability deteriorates due to unauthorized editing
Solution Approach 1:
The system dynamically changes the state of the editing screen based on user activity. When a user is active, the editing screen remains accessible. When inactivity is detected after a predetermined time, the system automatically logs out the user and deletes edited data, thereby adapting the accessibility level according to the operational context to prevent unauthorized editing while maintaining ease of use during legitimate operations.
2Reliability
If automatic logout and data deletion are implemented, then reliability is improved, but loss of information occurs when legitimate users are logged out
Solution Approach 1:
The system converts the potentially harmful loss of edited data into a beneficial security feature. By automatically deleting edited data upon timeout, the system prevents unauthorized users from accessing or executing maliciously edited recipes. The loss of data is framed as a protective mechanism that eliminates the risk of apparatus damage or product quality deterioration from unauthorized editing.
3Reliability
If authentication requirements are enforced, then reliability is improved, but ease of operation deteriorates due to additional login steps
Solution Approach 1:
The system implements periodic authentication through timeout-based logout. Instead of requiring continuous authentication or multiple login steps, the system maintains the editing screen accessible during active use and periodically checks for user inactivity. When the predetermined time elapses, it triggers a logout and requires re-authentication, thereby providing authorization control while minimizing disruption to legitimate operations.
Data Source
AI summary
To provide a substrate processing apparatus which can prevent a reduction in quality of a product, and damage to the apparatus. In a control program which operates on a substrate processing apparatus, a recipe storage portion and a parameter storage portion configure a data storage device which stores data relating to a control. On a user who has an authority being authenticated by an authentication process, the user carries out a data editing operation via an editing screen. A setting portion receives, via a UI device, operations for editing data stored by the data storage device. A timing portion measures a time between the operations received by the setting portion, and transmits the time to an operation control portion. In the event that the time measured by the timing portion has exceeded a prescribed time, the operation control portion prohibits the reception of the operations for editing the data.