Substrate Processing Controller Virus Inspection and Interruption
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Solution Overview
Problem
A substrate processing apparatus connected to a network is vulnerable to virus infections, which can impair its operation and reduce substrate processing throughput.
Innovation Solution
The apparatus includes a controller that processes substrates by executing a program, inspects for computer viruses, and executes an interruption program to halt the infected process, minimizing damage and allowing for safe reoperation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the substrate processing apparatus is connected to a network, then communication and data exchange capabilities are improved, but the risk of virus infection increases which can impair operation and reduce throughput
Solution Approach 1:
The system performs preliminary virus inspection of the processing program before execution. The inspection unit checks whether the processing program is infected with a computer virus prior to the execution unit running it, preventing virus-infected programs from compromising system reliability while maintaining network connectivity for program updates and exchanges
2Reliability
If virus inspection is performed on the processing program, then system reliability is improved, but processing time is increased due to additional inspection steps
Solution Approach 1:
The virus inspection is performed in advance before program execution, so that when the program needs to be run, it has already been verified. This preliminary checking ensures reliability without adding time to the actual processing cycle, as the inspection occurs during program loading or initialization phase rather than during substrate processing
Solution Approach 2:
The inspection unit is integrated into the control unit of the substrate processing apparatus itself, allowing the system to perform self-diagnosis and virus detection without requiring external inspection systems. This self-contained approach minimizes additional processing time by eliminating external communication delays
3Object-affected harmful factors
If an interruption program is executed when virus infection is detected, then harmful effects are minimized, but device complexity increases due to additional control logic
Solution Approach 1:
The harmful virus-infected processing program is extracted or removed from execution by the interruption unit. When the inspection unit detects a virus, the interruption program halts the execution of the problematic program and can transfer control to a safe mode or error handling routine, effectively separating the harmful element from the system operation while maintaining overall system functionality
Solution Approach 2:
The interruption program acts as an intermediary between the virus-infected processing program and the substrate processing apparatus. It serves as a protective layer that intercepts potentially harmful operations and redirects them to safe handling procedures, minimizing damage while adding only a thin layer of control logic rather than fundamentally redesigning the entire control system
Data Source
AI summary
There is provided a technique that includes: (a) processing a substrate by executing a processing program stored in a memory; (b) inspecting and determining whether the processing program is infected with a computer virus; and (c) executing at least one interruption program stored in the memory and configured to interrupt the processing program when the processing program is determined to be infected with the computer virus.