Substrate Conveyance Cycle for Throughput Optimization
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Solution Overview
Problem
Existing substrate processing apparatuses lack an effective method to properly set a conveyance schedule for substrate processing, leading to inefficiencies in throughput due to unclear timing and access protocols for substrate conveyance robots.
Innovation Solution
A substrate conveyance method that employs a cycle where the number of substrates conveyed is defined by the formula M=∑k=1N{(N-k+1)×ik}, allowing for efficient and rhythmic conveyance of substrates between processing units, with the ability to handle multiple substrates simultaneously and adjust based on the number of processing units capable of parallel processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conveyance robot with multiple arms is used to hold multiple substrates simultaneously, then the productivity is improved, but the device complexity increases and the conveyance schedule becomes difficult to manage
Solution Approach 1:
The patent divides the substrate conveyance process into discrete cycles with specific patterns. The conveyance robot's operations are segmented into repeating units that handle different numbers of substrates (1, 2, or 3 substrates per conveyance) in a systematic sequence. This segmentation transforms the complex management of multiple substrates into manageable, repetitive cycles with clear start and end points, making the schedule predictable and easier to control while maintaining high productivity
Solution Approach 2:
The patent implements periodic conveyance cycles where the robot repeatedly performs standardized sequences of substrate handling. Each cycle follows a defined pattern (such as conveying 1 substrate, then 2 substrates, then 3 substrates, and repeating) that creates a rhythmic, predictable operation. This periodic action simplifies schedule management by establishing regular intervals and consistent operation patterns, reducing the complexity of coordinating multiple arms and substrates while sustaining high throughput
2Adaptability or versatility
If the conveyance robot conveys substrates at irregular intervals, then the adaptability to different processing situations is improved, but the productivity decreases due to lack of rhythmic operation
Solution Approach 1:
The patent creates a dynamic conveyance system where the robot can adaptively adjust the number of substrates conveyed in each cycle based on real-time processing conditions. The system monitors the states of multiple processing units and dynamically selects the optimal conveyance pattern (conveying 1, 2, or 3 substrates) to match current capacity requirements. This dynamic adaptation maintains rhythmic periodic operation while providing flexibility to respond to changing processing situations, thereby preserving both productivity and adaptability
Solution Approach 2:
The patent changes the parameter of substrate quantity per conveyance cycle based on processing unit availability and demand. Instead of fixed irregular intervals, the system varies the number of substrates (1-3) conveyed in each periodic cycle according to processing unit states. This parameter change approach allows the system to maintain regular rhythmic operation while adapting to different situations, ensuring high throughput is sustained even as conditions change
Data Source
AI summary
Provided is a substrate conveyance method where a segment which can simultaneously hold M pieces of substrates defined by an integer M of 2 or more is provided, and a substrate conveyance part can simultaneously convey N pieces of substrates defined by an integer N of 2 or more which is not a divisor of the integer M from the segment or toward the segment. The substrate conveyance part performs a substrate conveyance cycle repeatedly where when N pieces of variables ik defined by integers k of 1 to N are arbitrary integers of 0 or more and not more than (M/N) and satisfy a relationship of M=N×i1+ . . . +1×iN, a conveyance step where a substrate conveyance step of simultaneously conveying (N−k−1) pieces of substrates from the segment or toward the segment by the substrate conveyance part is performed ik times is performed with respect to the conveyance step where the number of times of the substrate conveyance steps is defined by each variable which is a natural number out of N pieces of variables ik.