Substrate Conveyance Timing Using Predicted Processing Time
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Solution Overview
Problem
Conventional substrate processing systems face inefficiencies in throughput due to inaccurate transfer timing adjustments, particularly when variable data differs between substrates, leading to increased processing standby times and decreased throughput.
Innovation Solution
A method is introduced to adjust the transfer timing of substrates by calculating a predicted processing time based on the difference in adjustment values between substrates, ensuring that current substrates are transferred at the optimal time relative to the completion of preceding substrates' processing, thereby minimizing standby times and optimizing throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If transfer timing is adjusted based on fixed processing time, then system operation is simplified, but throughput decreases when variable data differs between substrates
Solution Approach 1:
The patent applies dynamics by transitioning from fixed transfer timing to dynamic transfer timing adjustment. The system now adapts transfer timing based on actual processing completion times of preceding substrates, allowing the control mechanism to respond to variations in processing duration caused by different variable data. This dynamic adjustment maintains high throughput while managing complexity through automated timing optimization.
Solution Approach 2:
The patent implements feedback by using the actual processing completion time of a preceding substrate to determine the transfer timing of the current substrate. The control mechanism receives feedback about processing duration variations and adjusts transfer timing accordingly, ensuring that transfers occur immediately after processing completion without unnecessary standby time, thereby maximizing throughput.
2Reliability
If transfer timing is delayed to ensure processing completion, then processing accuracy is improved, but standby time increases and throughput decreases
Solution Approach 1:
The patent applies preliminary action by predicting the processing completion time of the current substrate based on the actual processing time of the preceding substrate with similar variable data. This allows the system to schedule the transfer timing in advance, ensuring processing completion reliability while minimizing standby time by avoiding both premature and delayed transfers.
Solution Approach 2:
The system uses feedback from preceding substrate processing times to optimize transfer timing. By continuously learning from actual processing durations and adjusting transfer schedules accordingly, the system achieves reliable processing completion without excessive standby time, as transfer timing is precisely aligned with actual processing completion rather than using fixed conservative delays.
3Productivity
If transfer timing is optimized for each substrate, then throughput is improved, but control complexity increases
Solution Approach 1:
The patent reduces control complexity through preliminary action by pre-establishing the relationship between variable data and processing time characteristics. The control mechanism stores and references this preliminary information to quickly determine optimal transfer timing without requiring complex real-time calculations, thus achieving high throughput with manageable control complexity.
Solution Approach 2:
The system applies self-service by automatically adjusting transfer timing based on stored processing time data without requiring external intervention or complex control algorithms. The control mechanism serves itself by using its own accumulated data about processing durations to optimize future transfer timing, simplifying the control structure while maintaining high throughput.
Data Source
AI summary
This method is for conveying, in a processing system comprising at least one processing unit that performs a desired process on substrates and a conveyance unit that conveys the substrates to the processing unit, a plurality of substrates, which are to be continuously processed, from the conveyance unit to the processing unit. To each of the substrates, an adjustment value for optionally changing processing time is assigned in advance. The method comprises: a step for acquiring an adjustment value allocated to a first substrate to be processed this time; a step for acquiring a reference adjustment value allocated to a reference substrate processed before the first substrate; a step for acquiring an actual time which is an actual time of processing performed on the reference substrate; a step for calculating a predictive processing time for the first substrate by reflecting, on the actual time, a difference between the adjustment value allocated to the first substrate and the reference adjustment time; and a step for adjusting, on the basis of the calculated predictive processing time, a conveyance timing of a second substrate to be processed after the first substrate.