Substrate Conveyance Shutter Layout for Safe Concurrent Access
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Solution Overview
Problem
Existing substrate conveyance devices face challenges in ensuring operator safety without reducing work efficiency, as cutting off the power supply of the conveyance robot to prevent contact results in downtime and decreased productivity.
Innovation Solution
A substrate conveyance device equipped with a dual shutter mechanism, comprising an operator-side shutter and a conveyance robot-side shutter, allows safe access to the storage container mounting portion without powering down the conveyance robot, enabling simultaneous operation by the operator and robot.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the driving power supply of the conveyance robot is cut off to prevent contact with the operator, then operator safety is improved, but work efficiency deteriorates due to downtime and inability to perform work
Solution Approach 1:
The access path to the storage container mounting portion is divided into two separate paths: a first access path for operators and a second access path for the conveyance robot. By segmenting the access routes, the system allows operators and robots to work simultaneously without direct contact, eliminating the need to shut down the robot for operator safety while maintaining continuous productivity.
2Object-affected harmful factors
If the driving power supply of the conveyance robot is cut off to ensure safety, then contact prevention is improved, but time loss increases due to power restoration delays
Solution Approach 1:
The first shutter mechanism is positioned and ready to block the first access path before the operator needs to access the storage container mounting portion. This preliminary positioning of the shutter ensures that when the operator approaches, the path is already secured, preventing any need to cut off robot power and avoiding time loss associated with power restoration.
3Device complexity
If a single access path is used for both operators and conveyance robot, then device complexity is reduced, but safety deteriorates due to potential contact between operator and robot
Solution Approach 1:
The access path is segmented into two distinct routes: a first access path for operators blocked by a first shutter mechanism, and a second access path for the conveyance robot blocked by a second shutter mechanism. This segmentation physically separates operator and robot movements, ensuring safety while maintaining relatively simple device architecture through independent shutter controls.
Data Source
AI summary
Provided is a substrate conveyance device that can ensure safety of an operator without cutting off power supply of a conveyance robot. An operator-side shutter is provided between a storage container mounting portion and the outside of the device, and a conveyance robot-side shutter is provided between the conveyance robot and the storage container mounting portion.