Substrate Conveyance Scheduling via Virtual Positional Data
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Solution Overview
Problem
Existing substrate processing systems face challenges in smoothly conveying substrates between multiple apparatuses, leading to increased processing time and potential losses due to inefficient scheduling and intermediate handling.
Innovation Solution
A substrate processing apparatus that utilizes a control device to create jobs and schedules based on virtual positional information, allowing for direct and efficient conveyance of substrates between processing units, including a direct carry-in entrance, transfer units, and processing units, while optimizing substrate processing conditions and inspection results to enhance quality and reduce conveyance time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a substrate is directly conveyed between three devices (film-formation device, intermediate receiving/delivering portion, and cleaning device), then the conveyance speed is improved, but the substrate may not be conveyed smoothly between the devices
Solution Approach 1:
The control device creates a job and schedule in advance based on virtual substrate positional information before the substrate actually arrives at the second substrate processing apparatus. This preliminary scheduling ensures that the apparatus is ready to receive and process the substrate immediately upon arrival, enabling smooth direct conveyance without waiting or idle time, thus resolving the contradiction between speed and reliability
2Device complexity
If a schedule is created after substrate arrival, then the scheduling is simple, but conveying time is lost
Solution Approach 1:
The control device performs preliminary scheduling by creating a job and conveyance schedule before the substrate arrives at the second apparatus. It does this by receiving information about the substrate's location in the first apparatus, creating virtual positional information, and establishing the conveyance plan in advance. This eliminates waiting time and ensures immediate processing upon substrate arrival, resolving the time loss issue while maintaining manageable scheduling complexity
3Productivity
If virtual substrate positional information is used, then substrate conveyance efficiency is improved, but information management complexity increases
Solution Approach 1:
The control device creates virtual substrate positional information as a copy or representation of the actual substrate location in the first apparatus. This virtual information allows the second apparatus to prepare and schedule substrate processing in advance without needing complex real-time communication or tracking systems. The virtual copy simplifies information management while enabling efficient preliminary scheduling and improving overall conveyance productivity
Data Source
AI summary
A second control device of a second substrate processing apparatus creates a virtual carrier, thereby storing a piece of positional information of a substrate to be carried into the second substrate processing apparatus through a direct carry-in entrance before the substrate is carried into the second substrate processing apparatus. The second control device creates a second schedule to convey a substrate carried into the second substrate processing apparatus through the direct carry-in entrance from the outside of the second substrate processing apparatus to the inside of the second substrate processing apparatus, based on the prestored positional information of the substrate outside the second substrate processing apparatus, before the substrate is carried into the second substrate processing apparatus.