Substrate Conveying Robot Cable Guide Housing Design

Solution Overview

Problem

Conventional substrate conveying robots with arms that move up and down create dust dispersion in clean rooms due to the movement of robot cables and cable guides.

Innovation Solution

A substrate conveying robot design that incorporates a cable guide arranged inside a housing, which deforms to follow the robot cable as the arm moves up and down, thereby containing the cable and guide within the housing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the robot cable and cable guide are moved as the arm moves up and down, then the arm can be elevated, but dust and debris spread in the clean room environment

Engineering Contradiction:
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The cable guide is nested inside the housing structure, and the robot cable is guided through the cable guide. This nesting arrangement contains the moving cable components within the enclosed housing space, preventing dust and debris from spreading into the clean room environment while still allowing the arm to move up and down.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The housing acts as a flexible enclosure that contains the robot cable and cable guide. The housing structure allows the cable to move while maintaining a sealed environment, preventing contamination of the clean room space.

Inventive Principle:
Principle #30Flexible shells and thin films

2Device complexity

If the robot cable is arranged outside the housing, then the structure is simpler, but dust and debris can spread outside the housing

Engineering Contradiction:
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The cable guide is nested inside the housing structure, and the robot cable is guided through the cable guide. This nesting arrangement contains the moving cable components within the enclosed housing space, preventing dust and debris from spreading into the clean room environment while still allowing the arm to move up and down.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Object-affected harmful factors

If the cable guide is arranged inside the housing, then dust spreading is prevented, but the housing size increases

Engineering Contradiction:
Core Design Contradiction:
Object-affected harmful factorsVSVolume of stationary object

Solution Approach 1:

The cable guide is nested inside the housing structure, and the robot cable is guided through the cable guide. This nesting arrangement contains the moving cable components within the enclosed housing space, preventing dust and debris from spreading into the clean room environment while still allowing the arm to move up and down.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentUS12202124B2Substrate conveying robot
Publication Date: 2025.01.21
  • US12202124B2 patent drawing
  • US12202124B2 patent drawing
  • US12202124B2 patent drawing

AI summary

A substrate conveying robot includes a cable guide that is arranged inside a housing, in which a robot cable extending from an arm is arranged, and that deforms to follow the robot cable moved as the arm is moved up and down.