Substrate Conveying Robot Cable Guide Housing Design
Solution Overview
Problem
Conventional substrate conveying robots with arms that move up and down create dust dispersion in clean rooms due to the movement of robot cables and cable guides.
Innovation Solution
A substrate conveying robot design that incorporates a cable guide arranged inside a housing, which deforms to follow the robot cable as the arm moves up and down, thereby containing the cable and guide within the housing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the robot cable and cable guide are moved as the arm moves up and down, then the arm can be elevated, but dust and debris spread in the clean room environment
Solution Approach 1:
The cable guide is nested inside the housing structure, and the robot cable is guided through the cable guide. This nesting arrangement contains the moving cable components within the enclosed housing space, preventing dust and debris from spreading into the clean room environment while still allowing the arm to move up and down.
Solution Approach 2:
The housing acts as a flexible enclosure that contains the robot cable and cable guide. The housing structure allows the cable to move while maintaining a sealed environment, preventing contamination of the clean room space.
2Device complexity
If the robot cable is arranged outside the housing, then the structure is simpler, but dust and debris can spread outside the housing
Solution Approach 1:
The cable guide is nested inside the housing structure, and the robot cable is guided through the cable guide. This nesting arrangement contains the moving cable components within the enclosed housing space, preventing dust and debris from spreading into the clean room environment while still allowing the arm to move up and down.
3Object-affected harmful factors
If the cable guide is arranged inside the housing, then dust spreading is prevented, but the housing size increases
Solution Approach 1:
The cable guide is nested inside the housing structure, and the robot cable is guided through the cable guide. This nesting arrangement contains the moving cable components within the enclosed housing space, preventing dust and debris from spreading into the clean room environment while still allowing the arm to move up and down.
Data Source
AI summary
A substrate conveying robot includes a cable guide that is arranged inside a housing, in which a robot cable extending from an arm is arranged, and that deforms to follow the robot cable moved as the arm is moved up and down.


