Substrate Conveyor Spacer Handling Mechanism
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Solution Overview
Problem
The existing substrate conveying method in film deposition apparatuses experiences longer conveyance times due to reduced connection openings between substrate containers and the apparatus, leading to increased wait times when switching containers and conveying substrates, especially when spacer members are stored outside the apparatus.
Innovation Solution
A substrate conveying method and conveyor system that accommodates spacer members within the apparatus, allowing for simultaneous handling and transfer of substrates with spacer members, reducing the need for additional connection openings and minimizing wait times by integrating spacer member management within the apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If spacer members are stored outside the apparatus in separate containers, then substrate containers can be switched more frequently, but the conveyance time increases due to reduced connection openings and increased wait times
Solution Approach 1:
The patent combines the spacer member container with the substrate container into a single integrated container structure. This merging eliminates the need for separate connection openings for substrate and spacer member containers, allowing continuous communication between the container and apparatus while reducing wait times during switching operations.
Solution Approach 2:
The integrated container serves multiple functions simultaneously - it accommodates both substrates and spacer members, and maintains continuous connection to the apparatus for both types of components. This multi-functionality resolves the contradiction by enabling efficient handling of both substrates and spacer members through a single container interface.
2Ease of operation
If separate connection openings are provided for substrate containers and spacer member containers, then simultaneous handling is possible, but the apparatus size and complexity increase
Solution Approach 1:
The patent merges the substrate container and spacer member container into a single integrated container unit. This combination reduces the number of connection openings from two separate interfaces to one unified interface, thereby simplifying the apparatus structure while maintaining the capability to handle both substrates and spacer members simultaneously through the single connection opening.
3Adaptability or versatility
If substrate containers are switched frequently to accommodate different substrates, then versatility is improved, but wait time increases due to reduced connection openings
Solution Approach 1:
The integrated container provides universal accommodation for both substrates and spacer members through a single connection interface. This multi-functional design maintains versatility in handling different substrate types while eliminating wait times associated with switching between separate substrate and spacer member containers, as both can be accessed through the same continuous connection opening.
Data Source
AI summary
A substrate conveying method conveying a layered body having first and second substrates stacked with a spacer member provided between their respective bottom surfaces facing each other includes receiving the first substrate by holding the first substrate from below its bottom surface using a first holding mechanism provided on a side of a first fork provided above a second fork, and turning the first fork upside down and placing the received first substrate on the second fork; receiving the spacer member held in a substrate holding part by holding the spacer member from above using a second holding mechanism provided on the same side of the first fork as the first holding mechanism, and placing the received spacer member on the first substrate; and holding the second substrate from above its top surface using the first holding mechanism, and placing the received second substrate on the spacer member.