Substrate Conveyor Up-Down Table Precision Adhesion
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Solution Overview
Problem
Existing substrate conveyor apparatuses face challenges in reliably adhering substrates to the lower surface of a static chuck due to inferior vertical positioning precision compared to horizontal positioning precision.
Innovation Solution
A substrate conveyor apparatus with a movable stage and a chuck having an adhesion surface, equipped with an up-down mechanism and a conveyor arm that houses the substrate in a protection pod, allowing precise adherence and retention using a loss prevention member and retention mechanism to prevent dropping and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conveyor arm is used to carry the substrate directly to the chuck, then the substrate can be transported, but the vertical positioning precision is inferior compared to horizontal positioning precision, making it difficult to reliably adhere the substrate to the chuck
Solution Approach 1:
An up-down table is introduced as an intermediary device between the conveyor arm and the chuck. The conveyor arm places the substrate on the up-down table with loose positioning, then the up-down table moves vertically to achieve precise adhesion to the chuck surface, separating the rough positioning function from the precision positioning function
Solution Approach 2:
The positioning function is segmented into two stages: horizontal positioning by the conveyor arm (coarse positioning) and vertical positioning by the up-down table (fine positioning). This division allows each component to optimize for its specific direction, achieving both ease of operation and high precision
2Reliability
If the substrate is held by adhesion force alone, then the substrate can be retained on the chuck, but there is risk of dropping in error without additional retention mechanisms
Solution Approach 1:
Loss prevention members are positioned in advance to engage with the substrate before any potential dropping occurs. These members protrude from the chuck surface and make preliminary contact with the substrate, providing an additional retention barrier that activates only when needed
Solution Approach 2:
The loss prevention members act as a cushioning backup mechanism that prevents catastrophic failure. By having these members in place beforehand, the system compensates for potential adhesion failures, providing a safety margin against substrate dropping
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables reliable adherence and retention of substrates to the chuck, enhancing the precision and reliability of substrate handling, particularly in exposure applications, thereby improving the performance of exposure apparatuses.
Implementation Method 1
an up-down means equipped with an up-down table that is positionable in a position below the movable stage
Implementation Method 2
a chuck having an adhesion surface that faces down for adhering a substrate
Data Source
AI summary
A substrate conveyor apparatus carries a substrate such as reticle. A substrate conveyance method and an exposure apparatus reliably adhere a substrate to the lower surface of a chuck. A movable stage can move in the horizontal direction and is equipped with a chuck having an adhesion surface that faces down for adhering a substrate. An up-down means equipped with an up-down table is positionable in a position below the substrate and within the movement range of the movable stage, and a conveyance means equipped with a conveyor arm carries the substrate to the up-down means.