Substrate Cover with Segmented Conductive Member for Lithography
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Solution Overview
Problem
The challenge in semiconductor manufacturing is maintaining high drawing accuracy with charged particle beam lithography, as conductive materials on the substrate can become charged, deflecting the beam and reducing accuracy, and existing substrate covers with thick conductive plates interfere with the charged particle optical system, leading to inaccurate drawing and potential system breakage.
Innovation Solution
A substrate cover with a conductive frame body featuring a notch portion and recessed portions to house a conductive member that projects inward, allowing for contact with the substrate while minimizing thickness to avoid optical system interference, and includes brim and bank portions to prevent electron entry into gaps, ensuring accurate drawing without charging the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional substrate cover with conductive plates on the frame is used, then substrate charging is prevented, but the thickness increases causing interference with the charged particle optical system
Solution Approach 1:
The conductive member is divided into multiple segments (first conductive member, second conductive member, third conductive member) arranged in a comb-like structure. This segmentation allows the conductive function to be distributed across multiple thin layers rather than requiring a single thick conductive plate, thereby reducing overall thickness while maintaining charging prevention capability.
Solution Approach 2:
The patent employs thin film-like conductive members arranged in a comb structure instead of a solid thick conductive plate. This approach is analogous to using thin films to achieve the desired function with minimal thickness, allowing the substrate cover to be thin enough not to interfere with the charged particle optical system while still providing effective grounding.
2Length of stationary object
If the substrate cover thickness is reduced, then interference with the charged particle optical system is minimized, but the structural integrity and grounding capability may be compromised
Solution Approach 1:
The comb-like structure divides the conductive member into multiple segments (first, second, and third conductive members) with alternating arrangements. This segmentation provides multiple grounding contact points with the substrate, ensuring reliable grounding capability even when each individual segment is thin, thus maintaining reliability while reducing overall thickness.
Solution Approach 2:
The patent combines multiple conductive members (first conductive member, second conductive member, third conductive member) into a unified comb-like structure. This merging of multiple thin conductive elements creates a composite structure that achieves both thinness and sufficient grounding capability through the collective effect of multiple segments working together.
3Reliability
If conductive plates are provided on the frame to prevent charging, then substrate charging is suppressed, but the complexity of the substrate cover structure increases
Solution Approach 1:
The patent merges the frame structure with the conductive members into an integrated comb-like structure. The first conductive member, second conductive member, and third conductive member are combined with the frame to form a unified component, reducing the number of separate parts and simplifying the overall structure while maintaining effective charging prevention.
Solution Approach 2:
The comb-like structure serves multiple functions simultaneously: the frame provides structural support while the integrated conductive members provide grounding and charging prevention. This multi-functionality reduces the need for separate components, thereby reducing structural complexity while achieving reliable charging prevention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances drawing accuracy by preventing substrate charging and reducing the risk of optical system interference, allowing for precise pattern transfer while maintaining a thin substrate cover to avoid mechanical conflicts.
Implementation Method 1
a first conductive member provided on the recessed portion so as to pass through the notch portion to project inward
Implementation Method 2
a brim portion covering an upper portion of a gap between an inner wall of the notch portion and the conductive member main body
Data Source
AI summary
A substrate cover has a conductive frame body covering a surface circumference edge region and an upper circumference region of a substrate drawn with a charged particle beam, the conductive frame body comprising a notch portion provided at part of an inner circumference of the conductive frame body, and a recessed portion provided on the outer circumference side of the upper surface of the conductive frame body, such that the recessed portion is arranged adjacent to the notch portion in a direction of a frame width of the conductive frame body, and a conductive member provided on the recessed portion so as to pass through the notch portion to project inward to the inside of the frame of the conductive frame body, the conductive member comprising a contact portion electrically connected to the surface of the substrate, and a brim portion covering an upper portion of a gap.