Substrate Processing Data Collection Buffering and Sorting

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Solution Overview

Problem

Conventional substrate processing apparatuses face challenges in collecting data at high frequencies, leading to time lags and reduced accuracy in data analysis, which is crucial for semiconductor manufacturing processes.

Innovation Solution

A control system with a collecting unit that includes a buffer for temporarily storing data and a sorting mechanism to rearrange it into a time series based on attached time data, enabling precise and frequent data collection and transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If data is collected directly from components during substrate processing, then data collection frequency can be increased, but time lags and data accuracy deteriorate due to lack of buffering and sorting

Engineering Contradiction:

Improvedata collection frequencyVSAvoiddata accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies preliminary action by collecting and temporarily storing data in a buffer before final output. The collecting unit accumulates data from multiple components during processing, then sorts and outputs the data in time series order. This preliminary buffering and sorting action ensures that high-frequency data collection does not compromise data accuracy, as the data is properly organized before being used for analysis.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent introduces an intermediary mechanism (the buffer and sorting unit) between the data collection process and the data output process. This intermediary buffers the data flow, allowing high-frequency collection while maintaining accuracy through proper time-series sorting. The buffer acts as a mediator that decouples the collection frequency from the output timing, resolving the contradiction between speed and precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If data is transmitted through host control line, then data can be reported online, but data transmission frequency remains low at 0.5 Hz to 2 Hz, failing to reach the requested 10 Hz or more

Engineering Contradiction:

Improveonline data reporting capabilityVSAvoiddata transmission frequency

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent segments the data collection and transmission functions into distinct units: a collecting unit that gathers data from multiple components, a buffer that temporarily stores the data, and a sorting unit that organizes data in time series order. This segmentation allows the system to collect data at high frequency from multiple sources simultaneously, then output the sorted data at the required high frequency, overcoming the limitations of traditional host control line transmission.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent creates a copied data flow path that is separate from the traditional host control line transmission. The collecting unit creates a copy of the data from various components and processes it through the buffer and sorting unit, enabling independent high-frequency data collection and transmission without being constrained by the host control line's frequency limitations.

Inventive Principle:

Principle #26Copying

3Reliability

If multiple components are controlled with high frequency, then production control and failure detection improve, but data collection and output capability deteriorates due to system complexity

Engineering Contradiction:

Improveproduction control and failure detectionVSAvoiddata collection system complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements a universal collecting unit that can collect data from multiple different components (temperature control, pressure control, gas flow, event data, etc.) through a single standardized interface. This multi-functional collecting unit simplifies the overall system architecture by providing a unified data collection mechanism that handles various data types and sources, reducing the complexity that would otherwise arise from managing multiple separate data collection paths for different components.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS8712730B2Control system of substrate processing apparatus, collecting unit, substrate processing apparatus and control method of the substrate processing apparatus

Publication Date: 2014.04.29 KOKUSAI DENKI KK

AI summary

There is provided a control system of a substrate processing apparatus, comprising: a collecting unit for collecting data from each component that constitutes a substrate processing apparatus, the collecting unit further comprising at least: a buffer for temporarily storing collected data; and a sorting part for rearranging the collected data, based on time data attached to the collected data.