Substrate Processing Data Segmentation for Stable Step Acquisition
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Solution Overview
Problem
In semiconductor manufacturing, substrate processing apparatuses generate large volumes of data from numerous sensors, exceeding the memory capacity of data managers and leading to unstable data acquisition and processing.
Innovation Solution
Implementing a substrate processing system with a controller and memory that allows for step-by-step data acquisition, managed by a data manager capable of specifying the number of steps within a predefined data acquirable range to prevent data overflow, using a data acquirer and file generator to convert and store data in a suitable format.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If all sensor data from substrate processing apparatus is acquired and stored, then complete process monitoring is achieved, but data size exceeds memory capacity of data manager
Solution Approach 1:
The patent segments the complete process data into multiple chunks based on process steps. The data manager specifies the number of steps to include in each data acquisition request, dividing the total data volume into manageable portions that fit within memory constraints while maintaining complete process monitoring capability through multiple acquisitions.
2Loss of information
If data acquisition includes all process steps, then complete process information is obtained, but processing becomes unstable due to excessive data size
Solution Approach 1:
The patent implements partial action by acquiring data for a specified number of steps rather than all steps in one operation. The data manager calculates and specifies the optimal number of steps to include in each acquisition request, ensuring data completeness across multiple acquisitions while maintaining processing stability through controlled data volumes.
Data Source
AI summary
There is provided a technique, which includes: at least one substrate processing apparatus including a controller configured to be capable of controlling processing of a substrate according to a recipe including at least one step and a first memory configured to be capable of storing data of the at least one substrate processing apparatus that is reported during the processing of the substrate; and a data manager connected to the at least one substrate processing apparatus, configured to acquire the data, and configured to be capable of specifying the number of the at least one step that is included in the data to be acquired such that the data falls within a predefined data acquirable range.