Substrate Processing System Decompression Structure Bubble Control

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Solution Overview

Problem

The existing substrate cleaning systems face challenges in effectively supplying a gas-dissolved liquid with a supersaturated amount of dissolved gas due to pressure loss in the supply line, leading to large bubbles and inefficient cleaning, and the decompression structure is prone to electric discharge damage.

Innovation Solution

A substrate processing system with a decompression structure that includes a grounded conductive resin and a pressure regulation mechanism to generate ultra-fine bubbles, preventing electric discharge and ensuring efficient bubble generation without large bubbles in the supply line.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a gas-dissolved liquid is supplied through a supply line, then the liquid can be delivered to the substrate processing module, but pressure loss occurs making it difficult to maintain supersaturated gas content

Engineering Contradiction:

Improvedissolved gas amountVSAvoidpressure loss

Core Design Contradiction:

Quantity of substanceVSLoss of energy

Solution Approach 1:

The gas-dissolved liquid generation device dissolves gas in the liquid to a supersaturated state before the liquid enters the supply line. By performing the gas dissolution action in advance at the generation device, the system ensures high gas content is achieved prior to pressure loss occurring during transport, thus maintaining effective bubble generation capability despite pressure drops in the supply line.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If the pressure of gas supplied to the gas-dissolved liquid generation device is high, then gas dissolution efficiency improves, but large bubbles may generate in the supply line

Engineering Contradiction:

Improvegas dissolution efficiencyVSAvoidbubble size

Core Design Contradiction:

ProductivityVSShape

Solution Approach 1:

The control device regulates the pressure of gas supplied to the gas-dissolved liquid generation device to be lower than the pressure of liquid supplied to the device. By changing the pressure parameters to this specific relationship, the system achieves effective gas dissolution without creating excessive pressure differentials that would cause large bubble formation in the supply line, thus optimizing both dissolution efficiency and bubble size control.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If a decompression structure is attached to the supply line to generate bubbles, then cleaning effectiveness improves, but electric discharge may occur damaging the decompression structure

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidelectric discharge damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The supply line acts as an intermediary component between the gas-dissolved liquid generation device and the decompression structure. By ensuring the gas pressure is regulated to be lower than liquid pressure, the supply line mediates the pressure transition smoothly, preventing electric discharge conditions while allowing the decompression structure to function effectively for bubble generation and cleaning.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Loss of energy

If the amount of dissolved gas in the liquid is small, then pressure loss is reduced, but the amount of bubbles generated is insufficient for effective cleaning

Engineering Contradiction:

Improvepressure lossVSAvoidbubble amount

Core Design Contradiction:

Loss of energyVSQuantity of substance

Solution Approach 1:

The system performs gas dissolution to a supersaturated state in advance at the generation device before the liquid enters the supply line. This preliminary gas saturation ensures that even though some pressure loss occurs during supply, sufficient dissolved gas remains to generate adequate bubbles at the decompression structure for effective cleaning, thus resolving the trade-off between pressure loss and bubble quantity.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively supplies a gas-dissolved liquid with a supersaturated amount of dissolved gas, preventing decompression structure damage and enhancing cleaning efficiency by generating ultra-fine bubbles, thereby improving substrate cleaning reliability.

Implementation Method 1

a gas-dissolved liquid generation device that dissolves a gas in the liquid flowing through the supply line to a supersaturated state

Methodology Applied

Scientific EffectSupersaturation: Supersaturation

Implementation Method 2

a decompression structure configured to generate ultra-fine bubbles from the gas-dissolved liquid generated by the gas-dissolved liquid generation device

Methodology Applied

Scientific EffectBubble formation from supersaturated liquid: Bubble

Data Source

PatentUS20250010322A1Substrate processing system and decompression structure

Publication Date: 2025.01.09 EBARA CORP

AI summary

A substrate processing system capable of supplying a gas-dissolved liquid having a supersaturated amount of dissolved gas without generating large bubbles in a middle of a supply line is disclosed. The substrate processing system includes a control device configured to control an operation of a bubble generation device. The control device is configured to control at least one of a pressure regulator and a boost pump so that a pressure of a gas supplied to a gas-dissolved liquid generation device is smaller than a pressure of a liquid supplied to the gas-dissolved liquid generation device.