Substrate Delivery Segmentation for Wafer Transfer Efficiency
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Solution Overview
Problem
The existing substrate processing systems face limitations in increasing the number of wafers transferred per unit time due to increased moving distances of the substrate delivery apparatuses, which hinders efficient processing.
Innovation Solution
The system incorporates multiple first and second accommodating units stacked in a height direction, with dedicated first and second transfer apparatuses and delivery apparatuses that directly access specific units, reducing moving distances and optimizing the transfer process by arranging the first accommodating units at a middle height position and the second accommodating units on and below them.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single substrate delivery apparatus transfers substrates between lower and upper accommodation positions, then the system structure is simplified, but the moving distance of the delivery apparatus is increased
Solution Approach 1:
The patent divides the substrate delivery system into two separate delivery apparatuses: a first delivery apparatus for the upper group and a second delivery apparatus for the lower group. Each apparatus is responsible for delivering substrates to specific accommodation positions, thereby segmenting the delivery function to reduce individual moving distances and improve transfer efficiency.
Solution Approach 2:
The patent introduces a height dimension differentiation by placing first accommodating units at upper positions and second accommodating units at lower positions. This vertical arrangement allows delivery apparatuses to operate at optimized height levels, reducing the vertical travel distance compared to a single apparatus serving both upper and lower positions.
2Device complexity
If a single substrate delivery apparatus serves both upper and lower accommodation positions, then the number of components is reduced, but the number of wafers transferred per unit time is limited
Solution Approach 1:
The patent segments the substrate delivery function into parallel operations by providing separate first and second delivery apparatuses. The first delivery apparatus delivers substrates to upper accommodating units while the second delivery apparatus delivers to lower accommodating units simultaneously, enabling parallel substrate transfer operations that increase the number of wafers transferred per unit time.
Solution Approach 2:
The patent enables continuous substrate delivery operations by having multiple delivery apparatuses work in parallel without interfering with each other. While the first delivery apparatus operates on the upper level, the second delivery apparatus operates on the lower level, ensuring continuous and uninterrupted substrate supply to processing units, thereby maximizing productivity.
3Productivity
If multiple delivery apparatuses are introduced to reduce moving distances, then the number of wafers transferred per unit time increases, but the system complexity increases
Solution Approach 1:
The patent segments both the delivery apparatuses and accommodating units into grouped configurations. First delivery apparatuses are paired with first accommodating units for the upper group, while second delivery apparatuses are paired with second accommodating units for the lower group. This segmented architecture manages system complexity by creating modular, independently operable units rather than a monolithic complex system.
Data Source
AI summary
A substrate processing system is provided. The substrate processing system includes: a first transfer apparatus; at least two first accommodating units including an upper first accommodating unit and a lower first accommodating unit; multiple first substrate processing units, which are divided into at least a first group and a second group and arranged in a height direction; an upper second accommodating unit corresponding to the first group; an upper second transfer apparatus corresponding to the first group; a lower second accommodating unit corresponding to the second group; a lower second transfer apparatus corresponding to the second group; a first delivery apparatus corresponding to the first group; and a second delivery apparatus corresponding to the second group.