Substrate Detection Segmentation for Wafer Processing Throughput

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional substrate processing systems require a single detecting apparatus for both unprocessed and processed substrates, leading to prolonged detection times and reduced throughput due to the need to detect accommodated conditions of processed substrates, which are typically normal.

Innovation Solution

A substrate processing system with separate detecting parts for unprocessed and processed substrates, where the first detecting part scans each substrate to verify accommodation and conditions before processing, and the second detecting part collectively verifies the presence of processed substrates after processing, using light emitting and receiving elements to determine substrate placement and conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single detecting apparatus is used for both unprocessed and processed substrates, then device complexity is reduced, but detection time is prolonged and throughput is reduced

Engineering Contradiction:

Improvedetecting apparatus structureVSAvoidprocess throughput

Core Design Contradiction:

Device complexityVSProductivity

Solution Approach 1:

The detecting apparatus is divided into two independent detecting parts: a first detecting part for unprocessed substrates that performs detailed accommodation condition detection, and a second detecting part for processed substrates that performs simplified presence detection. This segmentation allows each part to be optimized for its specific function, with the second part requiring less detection time since processed substrates are typically normally accommodated.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different detection methods are applied to different substrate types based on their local characteristics. Unprocessed substrates require thorough accommodation verification, while processed substrates only need presence confirmation. This local quality approach matches the detection effort to the actual needs of each substrate type.

Inventive Principle:

Principle #3Local quality

2Measurement precision

If detailed accommodation condition detection is performed for processed substrates, then detection accuracy is improved, but detection time is prolonged

Engineering Contradiction:

Improvesubstrate detection accuracyVSAvoiddetection time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

For processed substrates, only partial detection (presence verification) is performed instead of complete accommodation condition detection, since processed substrates are typically normally accommodated. This partial action is sufficient for the actual needs while significantly reducing detection time.

Inventive Principle:

Principle #16Partial or excessive action

Solution Approach 2:

Accommodation condition verification is performed in advance on unprocessed substrates before processing. This preliminary action ensures that substrates are properly positioned before the processing step, eliminating the need for repeated detailed detection after processing.

Inventive Principle:

Principle #10Preliminary action

3Device complexity

If a common detecting apparatus is used for both substrate types, then device simplicity is maintained, but detection efficiency for processed substrates is reduced

Engineering Contradiction:

Improvedetecting system structureVSAvoidsubstrate processing efficiency

Core Design Contradiction:

Device complexityVSProductivity

Solution Approach 1:

The detecting apparatus is segmented into two functional parts with different detection capabilities. The first detecting part handles unprocessed substrates with full accommodation condition detection, while the second detecting part handles processed substrates with simplified presence detection, optimizing efficiency for each substrate type.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The detecting apparatus dynamically adapts its detection method based on the substrate type being detected. The system can switch between detailed accommodation condition detection and simplified presence detection modes, allowing optimal detection efficiency for each processing stage.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for more accurate and efficient detection of substrates in different conditions, reducing detection time and improving process throughput by using distinct detecting parts for unprocessed and processed substrates.

Implementation Method 1

using light emitting and receiving elements to determine substrate placement and conditions

Methodology Applied

Scientific EffectLight reflection: Reflection

Data Source

PatentUS8744615B2Substrate processing system, substrate detecting apparatus, and substrate detecting method

Publication Date: 2014.06.03 TOKYO ELECTRON LTD

AI summary

A substrate processing system comprising a first detecting part configured to detect unprocessed wafers, and a second detecting part configured to detect processed wafers. The first detecting part is configured to detect whether the unprocessed wafers are respectively accommodated in respective accommodating portions of a container or not, and to detect accommodated conditions of the respective unprocessed wafers accommodated in the respective accommodating portions. The second detecting part is configured to collectively detect whether the processed wafers are respectively accommodated in the respective accommodating portions of the container.