Substrate Dewatering Membrane With Boiling-Point Water Separation
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Solution Overview
Problem
Existing substrate processing methods face challenges in efficiently separating water from a mixture of water and organic solvents like isopropyl alcohol (IPA) using separation membranes, which is necessary for recycling IPA, due to the risk of pattern collapse during high-speed drying and the need to enhance separation efficiency.
Innovation Solution
A substrate processing apparatus and method that includes a rinse liquid supply nozzle, organic solvent supply nozzle, collection tank, circulation pipe with a dewaterer containing a separation membrane, and a heater to heat the mixed fluid to a boiling point or higher, facilitating efficient separation of water from the mixture.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a separation membrane is used to separate water from a mixed solution of water and organic solvent, then water separation can be achieved, but the separation efficiency is insufficient and time-consuming
Solution Approach 1:
The patent changes the temperature parameter of the mixed fluid from ambient temperature to boiling point or higher. This parameter change fundamentally alters the separation mechanism from simple membrane filtration to vapor-liquid separation, dramatically improving separation efficiency and reducing processing time.
Solution Approach 2:
The patent utilizes the phase transition of water from liquid to vapor by heating the mixed fluid to its boiling point. The separation membrane then separates water vapor from the liquid organic solvent, achieving rapid and efficient water removal that overcomes the limitations of conventional liquid-phase membrane separation.
2Productivity
If high-speed rotation is used to blow off adhering liquid for drying, then drying speed is improved, but the surface tension may collapse the pattern
Solution Approach 1:
The patent replaces the mechanical drying method (high-speed rotation) with a thermal-vaporization method. By heating the mixed fluid to boiling point and using the separation membrane to remove water as vapor, the drying process achieves rapid water removal without the mechanical stresses that cause pattern collapse.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the separation efficiency of water from a mixture with organic solvents, allowing for effective recycling of IPA and reducing the risk of pattern collapse during drying.
Implementation Method 1
a heater disposed downstream of the collection tank and upstream of the dewaterer in the circulation pipe, the heater heating the mixed fluid to a boiling point of the water or higher
Implementation Method 2
a dewaterer disposed in the circulation pipe and including a separation membrane that allows the water to pass through and does not allow the organic solvent to pass through
Data Source
AI summary
A substrate processing apparatus includes: a collection tank that stores a mixed fluid containing water supplied to a substrate and then collected and an organic solvent supplied to the substrate and then collected; a circulation pipe connected to the collection tank; a dewaterer disposed in the circulation pipe and including a separation membrane that allows the water to pass through and does not allow the organic solvent to pass through; a pump disposed in the circulation pipe; and a heater disposed downstream of the collection tank and upstream of the dewaterer in the circulation pipe, the heater heating the mixed fluid to a boiling point of the water or higher.