Substrate Processing Dilution Gas Concentration Measurement
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in accurately measuring high concentrations of process gases, such as IPA gas, due to measurement limits of concentration meters, which can lead to incomplete drying and potential water marks on substrates.
Innovation Solution
A substrate processing apparatus that includes a dilution part to mix the sample gas with a diluent gas, flowmeters to measure gas flows, and a calculation part to determine the original process gas concentration by dilution rate, allowing for accurate measurement even with high-concentration gases. This apparatus also features flow and temperature control parts to stabilize measurements and prevent condensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a process gas of high concentration is supplied into a processing chamber, then the drying process on substrates can rapidly proceed to prevent drying failure, but the concentration of the process gas cannot be accurately measured as it exceeds the measurement limit of a concentration meter
Solution Approach 1:
A dilution part is introduced as an intermediary component between the process gas supply and the concentration meter. This dilution part mixes the high-concentration process gas with a diluent gas to reduce its concentration to within the measurable range of the concentration meter, thereby enabling accurate measurement without compromising the drying speed in the processing chamber
Solution Approach 2:
The concentration parameter of the process gas is changed by diluting it with a diluent gas before measurement. By adjusting the concentration of the process gas to fall within the measurement range of the concentration meter through controlled dilution, accurate measurement becomes possible while maintaining the ability to achieve rapid drying
2Measurement precision
If the concentration of process gas is accurately measured, then the drying process can be optimized to prevent water marks, but additional measurement and calculation components increase device complexity
Solution Approach 1:
The concentration meter and associated measurement system are designed to serve multiple functions: measuring the concentration of process gas, providing feedback for process optimization, and enabling prevention of drying failures. This multi-functionality justifies the added complexity by delivering comprehensive process control benefits
Solution Approach 2:
A calculation part processes the concentration measurement data to provide feedback on the actual concentration of process gas in the processing chamber. This feedback mechanism enables continuous optimization of the drying process to prevent water marks, making the additional measurement and calculation components worthwhile
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of process gas concentrations, ensuring effective drying processes and preventing water marks on substrates by accurately calculating the concentration of high-concentration gases through dilution and flow control mechanisms.
Implementation Method 1
a dilution part for diluting a sample gas by mixing the sample gas extracted by an extraction part with a diluent gas supplied by a diluent gas supply part
Data Source
AI summary
A substrate processing apparatus of the present invention dilutes a sample gas by mixing the sample gas with nitrogen gas and measures the concentration of IPA gas contained in the diluted sample gas in a concentration measuring part. Then, the substrate processing apparatus calculates the concentration (C0) of IPA gas contained in the sample gas before being diluted by multiplying the measured concentration value (C1) by the reciprocal (1/P) of a dilution rate which is obtained on the basis of the amount of flow of the sample gas and that of the diluent gas, as C0=C1×(1/P). Therefore, even if IPA gas of high concentration is used, it is possible to accurately measure the concentration of the IPA gas.