Substrate Film Peeling Drain Separation to Prevent Clogging
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Solution Overview
Problem
The mixing of peeling and dissolving liquids in the drain piping of substrate processing apparatuses leads to increased consumption and environmental impact, as well as the risk of pipe clogging, making it difficult to reuse these liquids.
Innovation Solution
A substrate processing apparatus and method that includes a separator to distinguish between peeling and dissolving liquids, guiding film pieces to the drain piping using a guard and utilizing liquids with different solubility properties to prevent clogging and enable liquid reuse.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a dissolving liquid capable of dissolving the processing film is allowed to flow into the drain piping, then the film pieces can be dissolved and reduced, so that the risk of pipe clogging can be reduced, but the peeling liquid and the dissolving liquid are mixed in the drain piping and cannot be reused
Solution Approach 1:
The drain piping system is segmented into multiple channels: a first drain piping for peeling liquid and a second drain piping for dissolving liquid. This segmentation prevents mixing of the two liquids while maintaining separate disposal paths, allowing each liquid to be reused independently without causing pipe clogging
Solution Approach 2:
A liquid level sensor acts as an intermediary device to detect the liquid level in the processing chamber and control the switching between peeling and dissolving liquids. This intermediary mechanism ensures proper liquid selection without direct mixing, maintaining both liquid integrity and effective film removal
2Loss of substance
If the peeling liquid and dissolving liquid are mixed in the drain piping, then the consumption of liquids increases, resulting in a large environmental load and high running costs, but separating them requires additional piping complexity
Solution Approach 1:
The drainage system is divided into separate first and second drain piping channels, each dedicated to a specific liquid type. This segmentation enables independent liquid recovery and reuse without mixing, reducing overall liquid consumption while maintaining manageable system complexity through clear functional separation
Solution Approach 2:
The processing chamber is designed to universally handle both peeling and dissolving liquids through a unified liquid supply system with selective activation. The same chamber and basic piping infrastructure serve dual purposes, reducing the need for entirely separate systems while enabling liquid reuse
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces the risk of pipe clogging, decreases liquid consumption, and lowers environmental and operational costs by allowing the separation and reuse of peeling and dissolving liquids.
Implementation Method 1
the processing liquid is solidified or cured to form a processing film
Implementation Method 2
The processing film is soluble in one of the first liquid and the second liquid, and is insoluble or poorly soluble (hardly soluble) in the other of the first liquid and the second liquid
Data Source
AI summary
A substrate processing apparatus: includes a spin chuck; a nozzle to supply a processing liquid to a surface of a substrate; a processing film forming portion to solidify or cure the processing liquid to form a processing film; a peeling portion to peel off the processing film; a drain piping to discharge a waste liquid; a film piece discharge portion to guide film pieces of the processing film peeled off and discharged from the surface of the substrate to the drain piping using a first liquid; a second liquid supplying portion to supply a second liquid to the drain piping; a separator to separate the first liquid and the second liquid; a first liquid storage; and a second liquid storage. The processing film is soluble in one of the first liquid and the second liquid, and is insoluble or poorly soluble in the other of them.