Substrate Drying Apparatus Gas-Liquid Separator
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Solution Overview
Problem
Conventional substrate treating apparatuses face a high concentration of isopropyl alcohol in exhaust gas, which burdens the exhaust equipment, as the solvent vapor is not effectively separated from the gas during the drying process.
Innovation Solution
The apparatus incorporates a gas-liquid separating device that mixes exhaust gas with deionized water, a static mixer for efficient mixing, and a liquefying device with an orifice and cooling mechanism to reduce solvent concentration by condensing the solvent vapor into liquid, thereby reducing the solvent load on the exhaust equipment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a high concentration of isopropyl alcohol vapor is supplied into the chamber for effective substrate drying, then the drying efficiency is improved, but the solvent concentration in the exhaust gas becomes high, which burdens the exhaust equipment
Solution Approach 1:
A gas-liquid separating device is introduced as an intermediary component between the chamber exhaust and the exhaust equipment. This device receives the exhaust gas containing high concentration isopropyl alcohol vapor, separates the solvent from the gas phase, and directs the cleaned gas to the exhaust equipment while collecting the liquid solvent separately. This mediator resolves the contradiction by allowing high concentration vapor supply for drying while protecting the exhaust equipment from high solvent concentration burden.
Solution Approach 2:
The invention changes the physical state parameter of the isopropyl alcohol in the exhaust stream by condensing it from vapor phase to liquid phase through the gas-liquid separating device. This parameter change (phase transition) enables the solvent to be separated and collected in liquid form, reducing the solvent concentration in the gas phase that reaches the exhaust equipment, thus resolving the contradiction between drying efficiency and exhaust equipment burden.
2Manufacturing precision
If the solvent vapor concentration in the chamber is increased to improve drying performance, then the drying quality is enhanced, but the load on exhaust equipment increases due to high solvent concentration in exhaust gas
Solution Approach 1:
The gas-liquid separating device serves as an intermediary that decouples the drying process from the exhaust system. It allows high concentration solvent vapor to be present in the chamber for quality drying while intercepting and removing the solvent from the exhaust stream before it reaches the exhaust equipment, thereby reducing the equipment load without compromising drying quality.
Solution Approach 2:
The invention utilizes phase transition of isopropyl alcohol from vapor to liquid state through condensation in the gas-liquid separating device. This phase change enables efficient separation of the solvent from the exhaust gas, allowing high vapor concentration for drying quality while converting the solvent to liquid form for collection, thereby reducing the thermal and chemical load on the exhaust equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively lowers the solvent concentration in the exhaust gas by condensing and separating the solvent vapor, reducing the burden on exhaust equipment and improving the efficiency of the substrate drying process.
Implementation Method 1
a gas-liquid separating device having the other end of the exhaust pipe connected thereto for receiving the gas exhausted by the exhaust device, and having the other end of the drain pipe connected thereto for receiving the treating liquid drained through the drain pipe, the gas-liquid separating device separating the gas and the liquid
Implementation Method 2
a mixing device mounted on the exhaust pipe for mixing deionized water into the gas exhausted by the exhaust device
Data Source
AI summary
A substrate treating apparatus for drying substrates with a solvent vapor after treating the substrates with a treating liquid, includes a solvent vapor supply device for supplying the solvent vapor into a treating chamber, an exhaust device for exhausting gas from the chamber through an exhaust pipe, a drain pipe connected to the chamber for draining the treating liquid from the chamber, a gas-liquid separator at the other end of the exhaust pipe for receiving the gas from the exhaust device, and connected to the other end of the drain pipe for receiving the treating liquid from the drain pipe, the gas-liquid separator separating the gas and the liquid, and a mixer mounted on the exhaust pipe for mixing deionized water into the gas exhausted by the exhaust device.