Substrate Drying Using Heated Fluid Bottom Injection
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Solution Overview
Problem
Conventional substrate drying apparatuses using isopropyl alcohol (IPA) face issues such as rapid surface temperature reduction, increased IPA consumption, and watermark formation due to inefficient drying processes.
Innovation Solution
The method involves a pre-stage where heated fluid is injected to the bottom surface of a substrate to raise its temperature, followed by the injection of IPA and dry gas to the top surface, with a final stage featuring higher substrate rotation speeds and IPA injection from the center to the edge, optimizing vaporization and reducing particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If IPA solution is vaporized to dry substrates, then drying function is achieved, but surface temperature rapidly reduces increasing drying time and IPA consumption
Solution Approach 1:
The patent applies preliminary action by pre-heating the substrate to a predetermined temperature before introducing the IPA solution. This preliminary heating ensures that when the IPA is introduced, the substrate temperature is maintained during vaporization, preventing the rapid temperature reduction that would otherwise occur and extend drying time.
Solution Approach 2:
The patent changes the temperature parameter by controlling and maintaining the substrate at a predetermined temperature during the drying process. By adjusting and holding the temperature parameter at an optimal level, the vaporization of IPA is enhanced while preventing excessive cooling, thus resolving the contradiction between achieving drying function and maintaining temperature.
2Productivity
If IPA solution is vaporized rapidly, then drying speed increases, but watermarks and particles are generated
Solution Approach 1:
The patent optimizes the temperature parameter to a predetermined level that enables rapid vaporization of IPA while preventing the formation of watermarks and particles. By carefully controlling this critical parameter, the system achieves high drying speed without compromising manufacturing precision.
Solution Approach 2:
The patent maintains continuous heating and controlled vaporization throughout the drying process, ensuring that the substrate temperature remains stable. This continuous control prevents sudden temperature changes that could cause watermark formation, while maintaining high drying speed through sustained optimal conditions.
3Productivity
If substrate rotation speed is increased in final stage, then drying efficiency improves, but particle generation may increase due to rebound phenomena
Solution Approach 1:
The patent optimizes the substrate rotation speed parameter to a specific range that maximizes drying efficiency while minimizing particle generation. By precisely controlling this parameter, the system achieves high productivity without the harmful rebound phenomena that occur at excessive rotation speeds.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach maintains substrate temperature, reduces drying time and IPA consumption, and minimizes particle formation by preventing rapid temperature drops and rebound phenomena.
Implementation Method 1
a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate
Implementation Method 2
the IPA dryer uses a chemical reaction of IPA to dry substrates. That is, the IPA dryer vaporizes an IPA solution and substitutes DI water with the vaporized IPA solution to perform a drying process
Implementation Method 3
during the pre-stage and the final stage, a dry gas is injected with the organic solvent to improve a vaporization power of the organic solvent
Data Source
AI summary
A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.