Substrate Drying Nozzle Scanning Control for Hydrophobic Surface Defects
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Solution Overview
Problem
Conventional substrate drying methods, such as scan rinsing, often result in development failures due to the formation of multiple dried cores and subsequent dried marks on substrates with high water-repellent surfaces, which cannot be effectively eliminated by existing methods like air jet nozzles.
Innovation Solution
A substrate processing method where the discharge nozzle is scanned from the center to the periphery, and a gas jet nozzle is used to blow gas only after the first dried core is formed, preventing the creation of additional dried cores by ensuring the first dried region spreads to dry the entire substrate surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If scan rinsing is applied to dry substrates with high water-repellent surfaces, then drying effectiveness is improved, but multiple dried cores form causing development failures
Solution Approach 1:
The gas jet nozzle is positioned and activated in advance before the discharge nozzle reaches the center position, creating a gas flow field that prevents multiple dried cores from forming during the subsequent scanning process
Solution Approach 2:
A gas jet nozzle is introduced as an intermediary device between the discharge nozzle and substrate surface, using gas flow to mediate the drying process and prevent direct contact drying that causes multiple dried cores
2Manufacturing precision
If gas jet nozzle is used to blow gas during scan rinsing, then dried marks are reduced, but additional dried cores may form if timing is incorrect
Solution Approach 1:
The gas jet nozzle operation is controlled based on feedback from the discharge nozzle position, activating gas flow at the precise moment when the discharge nozzle approaches the center to prevent additional dried cores while eliminating dried marks
Solution Approach 2:
The gas jet nozzle is positioned and prepared in advance before the discharge nozzle reaches the optimal position, ensuring gas flow is already established when needed to prevent additional dried core formation
3Manufacturing precision
If discharge nozzle is scanned from center to periphery, then uniform drying is achieved, but multiple dried cores form on hydrophobic surfaces
Solution Approach 1:
Gas flow from the gas jet nozzle serves as an intermediary that modifies the interaction between the cleaning solution and hydrophobic substrate surface, preventing multiple dried cores while maintaining uniform drying during the center-to-periphery scanning process
Solution Approach 2:
The introduction of gas flow changes the physical parameters of the drying environment, altering the evaporation rate and fluid dynamics to prevent multiple dried cores on hydrophobic surfaces during uniform drying
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method eliminates the occurrence of development failures by ensuring only one dried region forms, preventing residual dried marks on the substrate and improving throughput by controlling the gas flow rate and timing.
Implementation Method 1
a gas jet nozzle is used to blow gas only after the first dried core is formed
Implementation Method 2
the cleaning solution having been fed on the center of the substrate diffuses toward a circumferential edge of the substrate by a centrifugal force to spread all over the substrate
Data Source
AI summary
A method and apparatus capable of eliminating occurrence of a development failure when a DI water discharge nozzle 20 is scanned to dry a substrate by spinning. A substrate is held in a horizontal posture by a spin chuck and rotated about a vertical axis by a rotation motor, and when an outlet of the nozzle is scanned from a position opposed to a center of the substrate W to a position opposed to a circumferential edge while a cleaning solution being discharged, immediately after the nozzle has started to move, only one dried core is produced in the vicinity of the center of the substrate, and thus production of not less than two dried cores in the vicinity of the center of the substrate is prevented. The dried region is spread all over the surface of the substrate.