Substrate Drying With Sublimable Support for Pattern Collapse
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Solution Overview
Problem
During the manufacturing of semiconductor devices and other micro-electromechanical systems, the removal of liquids after treatment can cause minute structural bodies to collapse due to surface tension, especially as patterns are downsized and aspect ratios increase, leading to pattern collapse issues.
Innovation Solution
A substrate processing method involving the use of a support member formed by changing a second liquid into a solid, which is then removed directly from the solid phase to the gaseous phase without passing through the liquid phase, thereby reducing the impact of surface tension on structural bodies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If liquid is removed after treatment, then processing is completed, but minute structural bodies collapse due to surface tension
Solution Approach 1:
A support member is formed on the substrate before liquid removal to provide mechanical support to the minute structural bodies. This preliminary structural reinforcement prevents collapse during the subsequent liquid removal process, allowing complete processing while maintaining manufacturing precision.
Solution Approach 2:
The support member acts as an intermediary element between the liquid and the minute structural bodies. It absorbs and redistributes the surface tension forces, preventing direct transmission of harmful forces to the structural bodies during liquid removal, thus resolving the contradiction between processing completion and structural integrity.
2Adaptability or versatility
If patterns are downsized and aspect ratios increased, then device functionality is improved, but pattern collapse becomes more likely
Solution Approach 1:
The support member is formed in advance on substrates with downsized patterns and high aspect ratios before liquid treatment. This preliminary support structure compensates for the reduced inherent stability of miniaturized patterns, enabling advanced device functionality while maintaining pattern reliability during processing.
3Manufacturing precision
If freezing processes are used to remove liquid, then pattern collapse is suppressed, but equipment complexity and cost increase
Solution Approach 1:
The invention replaces the complex mechanical freezing system with a simpler chemical/physical support member formation process. The support member provides mechanical protection through material properties rather than complex cryogenic equipment, achieving pattern integrity while significantly reducing equipment complexity and cost.
Solution Approach 2:
The support member is a temporary, easily removable structure that serves its protective function during liquid removal and then is discarded. This disposable approach avoids the need for expensive, complex freezing equipment while achieving the same protective effect, reducing both equipment complexity and processing cost.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively suppresses pattern collapse during drying, maintaining the integrity of structural bodies and improving processing efficiency by avoiding the need for complex and costly freezing processes, while allowing for simpler equipment configuration and shorter processing times.
Implementation Method 1
removing the support member by changing at least a part of the support member from a solid phase to a gaseous phase, without passing through a liquid phase
Data Source
AI summary
According to one embodiment, a substrate processing method is disclosed. The method can include treating a substrate with a first liquid. The substrate has a structural body formed on a major surface of the substrate. The method can include forming a support member supporting the structural body by bringing a second liquid into contact with the substrate wetted by the first liquid, and changing at least a portion of the second liquid into a solid by carrying out at least one of causing the second liquid to react, reducing a quantity of a solvent included in the second liquid, and causing at least a portion of a substance dissolved in the second liquid to be separated. The method can include removing the support member by changing at least a part of the support member from a solid phase to a gaseous phase, without passing through a liquid phase.