Patterned Substrate Drying With a Sublimable Support Film
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Solution Overview
Problem
Conventional substrate treating methods fail to appropriately dry substrates with patterns, leading to potential collapse of fine patterns due to inadequate drying techniques.
Innovation Solution
A substrate treating method involving a hydrophilization step to form a hydroxy group on the substrate, followed by a supplying step with a drying auxiliary liquid containing a sublimable substance with an oxime group, which forms a solidified film that supports the pattern and prevents collapse during sublimation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional substrate treating method is used, then the substrate can be processed through cleaning and drying steps, but the pattern on the substrate may collapse due to inadequate drying support
Solution Approach 1:
The patent introduces a drying auxiliary liquid containing a sublimable substance as an intermediary between the substrate and the drying environment. This liquid forms a solidified film that acts as a temporary support structure for the pattern during drying, preventing collapse. After drying completes, the solidified film is removed by sublimation, leaving the pattern intact. This intermediary substance resolves the contradiction by providing mechanical support during the critical drying phase without permanently affecting the pattern.
Solution Approach 2:
The patent utilizes parameter changes by controlling the phase transition of the sublimable substance. The substance transitions from liquid to solid when applied to the substrate, providing structural support. Then, by changing temperature or pressure parameters, the solidified film transitions from solid to gas phase through sublimation, removing itself without damaging the pattern. This dynamic parameter control enables the drying support function while maintaining pattern precision.
2Reliability
If a drying auxiliary liquid is applied to dry the substrate, then the substrate can be dried, but the pattern may still collapse if the liquid does not provide sufficient support
Solution Approach 1:
The drying auxiliary liquid is formulated as a composite material containing a sublimable substance and other components that work together. The sublimable substance provides the phase transition capability for temporary support, while other components may enhance adhesion, control viscosity, or modify sublimation characteristics. This composite formulation ensures both effective drying and pattern support simultaneously.
3Manufacturing precision
If the pattern is made fine to increase resolution, then the substrate can achieve higher precision, but the pattern becomes more susceptible to collapse during drying
Solution Approach 1:
The drying auxiliary liquid is applied to the substrate before the actual drying process begins. This preliminary application ensures that the solidified film is already in place to support the pattern when drying stresses are applied. The sublimable substance is deposited and solidified in advance, creating a protective framework that prevents fine patterns from collapsing during the subsequent drying phase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively dries the substrate while protecting the pattern from collapse, ensuring appropriate drying and pattern preservation.
Implementation Method 1
In the sublimation step, the solidified film is sublimated. In the sublimation step, the solidified film is removed from the substrate.
Implementation Method 2
a solidified film forming step of forming a solidified film containing the sublimable substance on the substrate by evaporating the first solvent from the drying auxiliary liquid on the substrate
Data Source
AI summary
The present invention relates to a substrate treating method and a substrate treating apparatus. The substrate treating method is for treating the substrate. The substrate has a pattern formed on a surface of the substrate. The substrate treating method includes the hydrophilization step, the first supplying step, the solidified film forming step, and the sublimation step. In the hydrophilization step, the hydroxy group is formed on the surface of the substrate. In the first supplying step, the drying auxiliary liquid is supplied to the substrate having the hydroxy group. The drying auxiliary liquid contains the sublimable substance and the first solvent. The sublimable substance contains an organic compound containing an oxime group. In the solidified film forming step, the first solvent evaporates from the drying auxiliary liquid on the substrate. In the solidified film forming step, the solidified film is formed on the substrate. The solidified film contains the sublimable substance. In the sublimation step, the solidified film is sublimated.