Substrate Edge Detection Using Inspection Recipes

Solution Overview

Problem

Existing substrate inspection systems face challenges in accurately detecting and adjusting the edges of multiple films on a substrate, as they often detect unintended edges due to simple contrast-based methods, leading to inefficiencies in film formation and processing.

Innovation Solution

A substrate inspection apparatus that uses a combination of inspection recipes and edge detection parameters to specifically identify target edges among multiple films, employing image gradient, conversion, search direction, priority, and filter parameters to exclude non-target edges, and adjusts nozzle positions for precise film formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If simple contrast-based edge detection method is used, then detection speed is improved, but detection accuracy deteriorates due to detection of unintended edges

Engineering Contradiction:

Improvedetection speedVSAvoidedge detection accuracy

Core Design Contradiction:

SpeedVSMeasurement precision

Solution Approach 1:

The patent changes the detection parameters by introducing multiple inspection recipes with different parameter combinations (threshold values, search ranges, gradient directions) to detect edges accurately among multiple films. Each recipe is optimized for specific film types and conditions, allowing accurate differentiation of target edges from non-target edges while maintaining efficient detection speed through automated parameter selection.

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If multiple inspection parameters and recipes are used to accurately detect target edges, then detection accuracy is improved, but system complexity increases

Engineering Contradiction:

Improvetarget edge detection accuracyVSAvoidinspection system complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the inspection system into multiple inspection recipes, each tailored for specific film types or detection conditions. Each recipe contains optimized parameter combinations for particular scenarios. This segmentation allows the complex multi-parameter inspection to be broken down into manageable, pre-configured modules, reducing the operational complexity while maintaining high detection accuracy through appropriate recipe selection.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary configuration of inspection parameters through pre-defined recipes that contain optimized parameter combinations for different film types and inspection conditions. By preparing these parameter sets in advance, the system eliminates the need for complex real-time parameter adjustments during inspection, thereby reducing system complexity while ensuring accurate target edge detection through pre-optimized settings.

Inventive Principle:

Principle #10Preliminary action

3Manufacturing precision

If automated edge detection with multiple parameters is implemented, then manufacturing precision is improved, but processing time increases

Engineering Contradiction:

Improvefilm formation accuracyVSAvoidinspection processing time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary configuration of inspection parameters through pre-defined recipes that contain optimized parameter combinations for different film types and inspection conditions. By preparing these parameter sets in advance, the system eliminates the need for complex real-time parameter adjustments during inspection, thereby reducing system complexity while ensuring accurate target edge detection through pre-optimized settings.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent changes the detection parameters by introducing multiple inspection recipes with different parameter combinations (threshold values, search ranges, gradient directions) to detect edges accurately among multiple films. Each recipe is optimized for specific film types and conditions, allowing accurate differentiation of target edges from non-target edges while maintaining efficient detection speed through automated parameter selection.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS11609502B2Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium

Publication Date: 2023.03.21 TOKYO ELECTRON LTD

AI summary

A substrate inspection apparatus includes: a storage configured to store inspection image data obtained from a captured image of a periphery of a substrate on which a plurality of films is formed, and an inspection recipe; and an edge detector configured to detect a target edge as an edge of an inspection target film among the films on the basis of the inspection image data stored in the storage by using the inspection recipe stored in the storage. Each of edges of the films extends along the periphery of the substrate. The inspection recipe is configured by combining parameters each of which has one option specified among a plurality of options.