Laminated Substrate Gap Filling With Multi-Viscosity Edge Fillers

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Solution Overview

Problem

Existing methods fail to reliably fill gaps between edge portions of laminated substrates with filler, leading to potential cracking and chipping during processing, and the applied filler may be dissolved by processing liquids, affecting substrate integrity.

Innovation Solution

A method involving multiple layers of fillers with varying viscosities and particle sizes is applied to the gap between substrate edges, including a low-viscosity first filler, a higher-viscosity second filler, and a chemically resistant third filler, ensuring complete filling and protection during post-processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single filler is applied to the gap between substrate edges, then the application process is simple, but the filler may not reliably enter minute gaps near bonding surfaces

Engineering Contradiction:
Improvefiller application simplicityVSAvoidgap filling completeness
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The filler application is segmented into multiple steps with different filler materials. A first filler with lower viscosity is applied to ensure penetration into minute gaps near bonding surfaces, followed by a second filler with higher viscosity to provide structural support and prevent chipping. This segmentation resolves the contradiction by combining the advantages of different filler properties in sequence.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the gap receive different filler materials based on their specific requirements. The region near the bonding surface receives the first low-viscosity filler for reliable penetration, while the outer edge region receives the second high-viscosity filler for mechanical protection. This local differentiation resolves the contradiction between simple application and reliable filling.

Inventive Principle:
Principle #3Local quality

2Strength

If filler is applied to protect edge portions, then cracking and chipping are prevented, but the filler may be dissolved by processing liquids in post-processing

Engineering Contradiction:
Improveedge portion protectionVSAvoidfiller chemical resistance
Core Design Contradiction:
StrengthVSStability of the object's composition

Solution Approach 1:

The chemical composition parameters of the filler are changed between the first and second fillers. The first filler is designed with lower viscosity for gap penetration, while the second filler is designed with higher chemical resistance to withstand post-processing liquids. This parameter change resolves the contradiction between protection strength and compositional stability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The solution uses composite material strategy by applying two different filler materials in sequence. The first filler provides gap-filling capability, while the second filler provides chemical resistance and mechanical strength. Together they form a composite protection system that resolves the contradiction between edge protection and resistance to processing liquids.

Inventive Principle:
Principle #40Composite materials

3Reliability

If multiple fillers with different viscosities are applied in sequence, then complete and reliable gap filling is achieved, but the application process time increases

Engineering Contradiction:
Improvegap filling completenessVSAvoidfiller application duration
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The first filler with lower viscosity is applied first to preliminarily fill the minute gaps near bonding surfaces before the second filler is applied. This preliminary action ensures that the critical regions are filled first, allowing the second filler to focus on providing structural support without needing to penetrate deep into the gaps, thereby reducing overall application time while maintaining reliability.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS12544994B2Substrate processing method
Publication Date: 2026.02.10 EBARA CORP
  • US12544994B2 patent drawing
  • US12544994B2 patent drawing
  • US12544994B2 patent drawing

AI summary

The present application relates to a substrate processing method of suppressing cracking and chipping of a laminated substrate manufactured by bonding substrates, and more particularly to a technique of applying filler to a gap formed between edge portions of the substrates constituting the laminated substrate. The substrate processing method includes: applying a first filler to the gap between an edge portion of a first substrate and an edge portion of a second substrate; and applying a second filler to the gap between the edge portion of the first substrate and the edge portion of the second substrate after applying of the first filler. A viscosity of the first filler is lower than a viscosity of the second filler.