Imaging Device for Substrate Peripheral Edge Inspection
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Solution Overview
Problem
In existing substrate processing systems, the separation of bevel washing and inspection devices leads to a time difference between failure occurrence and detection, resulting in yield reduction due to the difficulty in incorporating inspection devices with large constituent elements into the substrate processing apparatus.
Innovation Solution
An imaging device with a light source, a diffusing illuminator, and a guide unit is integrated into the substrate processing apparatus, allowing for versatile imaging of the peripheral edge parts of substrates using diffused light and reflected images, enabling efficient inspection without the need for large inspection device components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional inspection device with large constituent elements is used, then inspection capability is achieved, but integration into substrate processing apparatus becomes difficult
Solution Approach 1:
The inspection device is segmented into a compact head unit containing essential components (light source, diffusing illuminator, guide unit, imager) that can be integrated into the substrate processing apparatus, while maintaining full inspection functionality. This segmentation allows the inspection capability to be embedded without requiring a complete separate inspection device.
Solution Approach 2:
The imaging components are nested within a compact head unit structure that fits within the substrate processing apparatus. The light source, diffusing illuminator, guide unit, and imager are arranged in a nested configuration where smaller components are positioned within or around larger ones, maximizing space utilization and enabling integration.
2Ease of manufacture
If inspection device is separated from substrate processing apparatus, then each device can be optimized independently, but time difference between failure occurrence and detection increases
Solution Approach 1:
The inspection device is merged with the substrate processing apparatus by integrating the imaging components directly into the processing equipment. This combination allows simultaneous processing and inspection operations, eliminating the time delay between failure occurrence and detection while maintaining the ability to optimize both functions through coordinated design.
Solution Approach 2:
The imaging components are positioned and configured in advance within the substrate processing apparatus to enable immediate inspection upon substrate processing. The light source, diffusing illuminator, and guide unit are pre-arranged to capture images of the substrate periphery during or immediately after processing, ensuring rapid failure detection.
3Illumination intensity
If light source is positioned close to substrate, then illumination intensity increases, but imaging accuracy of peripheral edge part decreases
Solution Approach 1:
A diffusing illuminator is introduced as an intermediary between the light source and the substrate periphery. This diffusing illuminator scatters the light to create uniform illumination across the peripheral edge area, eliminating harsh shadows and hot spots that would compromise imaging accuracy, while maintaining sufficient illumination intensity for clear image capture.
Solution Approach 2:
The illumination system is designed with local quality by positioning the light source at a distance to provide broad coverage, then using the diffusing illuminator to concentrate and uniformize the light distribution specifically at the peripheral edge region. This creates optimal illumination conditions locally at the area of interest while maintaining overall system efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for accurate and efficient imaging of substrate peripheral edges, reducing the size of the inspection device and facilitating its integration into the substrate processing apparatus, thereby improving inspection accuracy and reducing yield loss.
Implementation Method 1
a diffusing illuminator configured to illuminate the peripheral edge part with diffused light generated by diffusing and reflecting the illumination light from the light source
Implementation Method 2
a diffusing illuminator configured to illuminate the peripheral edge part with diffused light generated by diffusing and reflecting the illumination light from the light source
Implementation Method 3
a guide unit configured to guide reflected light reflected by the peripheral edge part illuminated with the diffused light
Data Source
AI summary
In a substrate processing apparatus according to the invention, a light source and an imager are arranged at a position distant from an object to be imaged such as a substrate, whereas a head unit is arranged at an imaging position. Diffused light is generated by diffusing and reflecting illumination light from the light source and illuminated a peripheral edge part of the object to be imaged. Further, reflected light from the peripheral edge part illuminated with the diffused light is guided to the imager, whereby the peripheral edge part is imaged by the imager.