Substrate Edge Inspection Recipe for Intersecting Film Boundaries

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Solution Overview

Problem

Existing substrate inspection systems face challenges in accurately detecting and inspecting the edges of multiple films on a substrate, particularly when these edges are close or intersecting, leading to difficulties in precise edge detection and adjustment.

Innovation Solution

A substrate inspection apparatus equipped with an edge detector and an inspection recipe configuration system that uses specific parameters and search ranges to selectively detect target edges among multiple edges on a substrate, allowing for precise edge detection and adjustment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional substrate inspection systems are used to detect edges of multiple films, then general edge detection is possible, but accurate detection of target edges among close or intersecting edges cannot be achieved

Engineering Contradiction:

Improveedge detection accuracyVSAvoiddifficulty in detecting target edges among multiple edges

Core Design Contradiction:

Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The inspection recipe is segmented into multiple parameters (edge detection parameters, search range parameters, priority parameters) that can be independently configured. This segmentation allows the system to divide the complex task of detecting multiple edges into manageable components, where each parameter controls a specific aspect of the detection process, enabling precise identification of target edges among close or intersecting edges

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system applies local quality by configuring different inspection parameters for different regions or types of edges. The search range parameters define specific regions where target edges are expected to be located, and priority parameters assign different importance levels to different edge detection tasks. This allows the system to focus computational resources and detection accuracy on specific target edges rather than treating all edges uniformly

Inventive Principle:

Principle #3Local quality

2Adaptability or versatility

If inspection parameters are configured to detect all edges, then comprehensive edge detection is possible, but precise detection of specific target edges becomes difficult

Engineering Contradiction:

Improveability to detect multiple edgesVSAvoidprecision in detecting specific target edges

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The system utilizes parameter changes by allowing dynamic configuration of inspection parameters including search range parameters that define detection regions, edge detection parameters that control detection sensitivity, and priority parameters that rank different edge detection tasks. By changing these parameters based on the specific inspection requirements, the system can adapt between detecting all edges comprehensively and focusing on specific target edges with high precision

Inventive Principle:

Principle #35Parameter changes

3Adaptability or versatility

If manual configuration of inspection parameters is used, then flexibility in detecting different edge types is possible, but time consumption and operational complexity increase

Engineering Contradiction:

Improveflexibility in inspection configurationVSAvoidtime for configuring inspection parameters

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system implements preliminary action by providing pre-configured inspection recipes that contain default values for all inspection parameters. These pre-configured settings represent common inspection scenarios that have been optimized in advance. Users can directly utilize these pre-configured recipes or make minor adjustments, eliminating the need to manually configure all parameters from scratch and significantly reducing setup time while maintaining flexibility

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS11823922B2Substrate inspection apparatus, substrate processing apparatus, substrate inspection method, and computer-readable recording medium

Publication Date: 2023.11.21 TOKYO ELECTRON LTD

AI summary

A substrate inspection apparatus includes: a storage configured to store inspection image data obtained from a captured image of a periphery of a substrate on which a film is formed, and an inspection recipe; an edge detector configured to detect a target edge as an edge of an inspection target film on the basis of the inspection image data stored in the storage by using the inspection recipe stored in the storage; a periphery calculator configured to calculate a position of a theoretical periphery of the substrate; and a width calculator configured to calculate a width between the theoretical periphery of the substrate and the target edge on the basis of position data of the theoretical periphery of the substrate obtained by the periphery calculator and position data of the target edge obtained by the edge detector.