Substrate Edge Heating Layout Using Oblique LED Irradiation
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Solution Overview
Problem
Existing substrate processing apparatuses face limitations in efficiently heating the peripheral edge part of substrates due to layout restrictions, which prolong the processing time.
Innovation Solution
A substrate processing apparatus that utilizes a light emitting element, such as an LED, arranged obliquely to irradiate light onto the peripheral edge part of a rotating substrate, allowing efficient heating of this region.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the LED is arranged at a position right below the lower surface peripheral edge part of the substrate, then the heating efficiency of the peripheral edge part is improved, but the layout is restricted by other apparatus components such as splash guard and driving mechanism
Solution Approach 1:
The patent transitions from a horizontal arrangement of LEDs to an oblique/angled arrangement. By positioning the LEDs at an angle relative to the substrate surface rather than directly beneath it, the design achieves effective heating of the peripheral edge while avoiding interference with overhead components like the splash guard and driving mechanism. This dimensional change in LED orientation resolves the spatial conflict.
Solution Approach 2:
The patent employs asymmetric positioning of the LEDs relative to the substrate, placing them at an oblique angle rather than in a symmetric horizontal configuration. This asymmetric arrangement allows the light emission path to clear other apparatus components while still effectively heating the peripheral edge region, thus resolving the layout restriction problem.
2Device complexity
If the LED is arranged away from the end surface toward the axis of rotation, then the layout restriction is avoided, but the heating efficiency of the peripheral edge part decreases
Solution Approach 1:
By changing the angular dimension of LED placement from horizontal to oblique, the invention maintains adequate distance from the substrate end surface to avoid component interference while still directing light effectively onto the peripheral edge region. The angled positioning compensates for the increased distance through improved light path geometry.
Solution Approach 2:
The patent changes the angular parameter of LED positioning from 0 degrees (horizontal) to an oblique angle. This parameter change allows the LEDs to be positioned further from the substrate edge while maintaining effective heating by directing light at an angle that concentrates energy on the peripheral edge region during substrate rotation.
3Stability of the object's composition
If multiple light emitting elements are arranged to cover the entire peripheral edge, then the heating uniformity is improved, but the number of components and device complexity increases
Solution Approach 1:
The patent combines multiple LEDs into a single integrated lighting assembly or module positioned at an oblique angle. This merged configuration provides comprehensive illumination of the peripheral edge region through the angled light path, achieving heating uniformity while reducing component count and simplifying the overall device structure compared to multiple separately positioned LEDs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables rapid heating of the substrate's peripheral edge, reducing processing time and optimizing apparatus design by minimizing the number of light emitting elements required.
Implementation Method 1
a heating mechanism configured to heat the substrate by irradiating light to one principal surface of the substrate, the light being emitted from a light emitting surface of a light emitting element
Data Source
AI summary
A light emitting element is positioned at a position right below one principal surface of a substrate rotating about an axis of rotation and away from an end surface of the substrate toward the axis of rotation. The light emitting element is arranged as to be inclined from a horizontal plane so that the light emitting surface faces a peripheral edge part of the substrate. Light emitted from the light emitting surface of the light emitting element is irradiated to a lower surface peripheral edge part of the substrate or a region near the lower surface peripheral edge part. As a result, a processing by the processing liquid is possible in a short time.