Substrate Peripheral Edge Processing with Image-Based Positioning
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Solution Overview
Problem
Existing peripheral edge processing technologies lack precision in handling the edge portions of substrates, leading to inaccuracies and variations in film processing.
Innovation Solution
A peripheral edge processing apparatus and method that includes capturing substrate images, calculating theoretical edge positions, setting processing parameters, and processing the edge portions based on these parameters to achieve high precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional peripheral edge processing is used, then processing can be performed, but processing precision is insufficient and inaccuracies occur
Solution Approach 1:
The patent applies preliminary action by capturing an image of the peripheral edge portion of the substrate before processing, and calculating the theoretical peripheral edge position based on this captured image. This preliminary measurement and calculation step enables the subsequent processing to be guided by accurate positional information, thereby improving processing precision and reducing inaccuracies in film formation at the substrate edges
Solution Approach 2:
The patent implements feedback by using the captured image of the peripheral edge portion to calculate the theoretical peripheral edge position, which then serves as a reference for setting processing parameters. This feedback loop ensures that the processing parameters are adjusted based on actual measured positions, improving both manufacturing precision and processing reliability
Data Source
AI summary
An apparatus includes: an capturing part that captures a peripheral edge portion of a substrate including a reference substrate and a workpiece substrate, so as to acquire captured images of the reference and workpiece substrates; a first calculation part that calculates a theoretical peripheral edge position of the reference substrate in the captured image of the reference substrate with reference to a center thereof; a second calculation part that calculates a theoretical peripheral edge position of the workpiece substrate in the captured image of the workpiece substrate based on the theoretical peripheral edge position of the reference substrate and the captured image of the workpiece substrate; a setting part that sets processing parameters for the peripheral edge portion of the substrate based on the theoretical peripheral edge position of the workpiece substrate; and a processing part that processes the peripheral edge portion of the substrate based on the processing parameters.